Patents Represented by Attorney, Agent or Law Firm Thu A. Dang, Esq.
  • Semiconductor device on a combination bulk silicon and silicon-on-insulator (SOI) substrate
    Patent number: 6825534
    Abstract: A semiconductor device includes a combination substrate having a bulk silicon region, and a silicon-on-insulator (SOI) region. The SOI region includes a crystallized silicon layer formed by annealing amorphous silicon and having isolation trenches formed therein so as to remove defective regions, and isolation oxides formed in the isolation trenches.
    Type: Grant
    Filed: December 27, 2000
    Date of Patent: November 30, 2004
    Assignee: International Business Machines Corporation
    Inventors: Howard H. Chen, Louis L. Hsu, Li-Kong Wang