Abstract: A fluid mass flow controller, particularly adapted for controlling mass flow rates of toxic and reactive gases used in semiconductor device fabrication, includes a control circuit connected to pressure sensors for sensing the differential pressure across a flow restrictor in the mass flow controller for controlling a valve to control the fluid mass flow rate to a setpoint. The control circuit compares the differential pressure with the downstream pressure at a measured temperature with a data set of a gas passing through the flow controller for a range of differential pressures and downstream pressures and adjusts the flow control rate accordingly. The flow controller is mechanically uncomplicated including a two part body for supporting the pressure sensors, a remotely controllable flow control valve and the flow restrictor.
Type:
Grant
Filed:
September 20, 2000
Date of Patent:
April 1, 2003
Assignee:
FuGasity Corporation
Inventors:
William W. White, William H. White, Christopher B. Davis, Nelson D. Smith