Abstract: Alignment of clusters to pages is provided in a non-volatile memory system that receives data from a host in clusters and writes data to a memory array in units of a page. Alignment is implemented within each block using offsets in logical-to-physical mapping of data. Different blocks may have different offsets. When a host sends data with different cluster boundary locations, the data may be written with different offsets so that data maintains alignment.

Abstract: Methods of preparing a carbon doped oxide (CDO) layer with a low dielectric constant and low residual stress are provided. The methods involve, for instance, providing a substrate to a deposition chamber and exposing it to a chemical precursor having molecules with at least one carbon-carbon triple bond, followed by igniting and maintaining a plasma in a deposition chamber using radio frequency power having high and low frequency components or one frequency component only, and depositing the carbon doped oxide film under conditions in which the resulting dielectric layer has a compressive stress or a tensile stress of not greater than, e.g., about 50 MPa, and dielectric constant of less than 3.