Patents Represented by Attorney, Agent or Law Firm Wetman, Champlin & Kelly, P.A.
  • Patent number: 6505516
    Abstract: A pressure sensor with a diaphragm that has a dielectric portion that moves in a cavity near capacitor plates that are fixed relative to a mounting frame. The diaphragm is supported on the frame and the frame surrounds the cavity. The diaphragm has an outer surface that receives pressure and has an inner surface facing the cavity. The capacitor plates, which are fixed, sense movement of the nearby dielectric portion and generate an electrical output representative of pressure. Creep of metallizations on a flexible diaphragm are avoided. Manufacture is simplified because metallization of the diaphragm is avoided.
    Type: Grant
    Filed: January 6, 2000
    Date of Patent: January 14, 2003
    Assignee: Rosemount Inc.
    Inventors: Roger L. Frick, Charles R. Willcox