Abstract: A gas inlet apparatus and method for introducing gas streams into the process chamber of a chemical vapor deposition reactor. The inlet includes conduits that are coaxially arranged and spaced radially apart, with the passageways formed therebetween carrying the gas streams. A conical surface is provided at the stream-exiting end of the inlet so that gases impinge upon it and are then dispersed within the reactor.

Abstract: A scanning optical imaging or mapping system for macroscopic specimens is disclosed, which allows both confocal and non-confocal imaging to be performed in reflected light, photoluminescence, fluorescence and other contrast mechanisms. Several embodiments are disclosed, for use in photoluminescence mapping of semiconductor specimens, fluorescence scanning of gels used in gene sequencing, fingerprint detection, and other application areas.

Abstract: A scanning optical microscope or mapping system for spectrally-resolved measurement of light reflected, emitted or scatttered from a specimen is disclosed, in which the spectrally-resolving element is integrated into the detection arm of the microscope or mapping system to result in good photon collection efficiency as well as good spectral and spatial resolution. A confocal version of the microscope is disclosed which will be of particular interest in fluorescence microscopy, and the non-confocal mapping system will be of particular interest in photoluminescence mapping of semiconductor wafers.