Abstract: The present invention is directed to a device for receiving an object in a reproducible manner, comprising: —a substantially rigid housing comprising an opening configured to receive therein the object to be reproducibly received; —first elastic engaging means comprising a first set of elastic flexure elements which are configured, when the object to be reproducibly received is situated in an engaging state received in the opening, to engage on the circumferential form of the object to be reproducibly received present at that position; —second engaging means which are configured, when the object to be reproducibly received is situated in an engaging state received in the opening, to engage on the circumferential form of the object to be reproducibly received present at that position; and —wherein the first elastic engaging means and the second engaging means are arranged some distance from each other in the opening. Furthermore, the invention is related to a method for manufacturing such a receiving device.

Abstract: The present invention is directed to a device for receiving an object in a reproducible manner, comprising:—a substantially rigid housing comprising an opening configured to receive therein the object to be reproducibly received;—first elastic engaging means comprising a first set of elastic flexure elements which are configured, when the object to be reproducibly received is situated in an engaging state received in the opening, to engage on the circumferential form of the object to be reproducibly received present at that position;—second engaging means which are configured, when the object to be reproducibly received is situated in an engaging state received in the opening, to engage on the circumferential form of the object to be reproducibly received present at that position; and—wherein the first elastic engaging means and the second engaging means are arranged some distance from each other in the opening. Furthermore, the invention is related to a method for manufacturing such a receiving device.

Abstract: In an optical distance sensor for measuring object surfaces with high precision and comprising an objective lens for focusing a measuring beam to a measuring spot on the surfaces, measuring errors due to tilt of an object surface can be detected by using a pupil monitor, which senses the radiation intensity distribution of the reflected measuring beam effectively in the pupil of the objective lens to generate a tilt signal, which can be supplied to a correction/calibration table to obtain a correction signal, which is suitable for correcting the primary distance measuring signal of the sensor. Especially for a differential confocal distance sensor having pinholes arranged in front of radiation-sensitive detectors, a further order of correction can be obtained by determining optimum position and diameter of these pinholes.

Abstract: In a optical sensor (30) for measuring object surfaces (2) with high precision, measuring errors due to tilt of an object surface can be corrected by using a pupil monitor (72), which senses the intensity distribution of the reflected measuring beam (b?) in combination with a correction/calibration table (76) and use the monitor signal to correct the primary measuring signal (FES) of the sensor. Especially for a differential confocal sensor, a further order of correction can be obtained by determining optimum position and diameter of the pinholes. The measurement beam is directed to an object via a beams splitter cube and an objective that focuses the beam on an object surface. Light is received back from the object surface through the objective and split off by the splitter, from where it is directed to a sensor. In order to increase the measurement range the objective is mounted on an actuator. An interferometer is used to measure the position of the objective.