Abstract: Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.

Abstract: Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.

Abstract: Examples of a optoelectronic transducer module with integrated signal processing for use in thermographic temperature measurement are disclosed. The module includes a light source, an optical element to couple the light to an optical port, a connector configured to connect the optoelectronic transducer module to a fiber optic sensor, a detector to detect an emitted light from the fiber optic sensor and convert the detected emitted light into an electrical signal and a module processing unit coupled to the light source and the detector configured to convert the electrical signal into a set of digital results. The optoelectronic module is in communication with an external processing unit using a high speed circuitry for data aggregation and a low speed circuitry for configuration and firmware upgrade in the module. The opto-electronic module is replaceable during operation to avoid big downtime.

Abstract: Examples of a monolithic phosphor composite for measuring a parameter of an object are disclosed. The ceramic metal oxide phosphor composite is used in an optical device for measuring the parameter of the measuring object. The device comprises a fiber optic probe with a light guide, a light source operatively coupled to the fiber optic probe to provide excitation light into the light guide, a monolithic ceramic metal oxide phosphor composite functionally coupled to a tip of the fiber optic probe, a sensor operatively coupled to the fiber optic probe to detect the emitted light and a processing unit functionally coupled to the sensor to process the emitted light. The monolithic ceramic metal oxide phosphor composite can be embedded in a notch made into the object or can be adhered to a surface of the object with a binder.

Abstract: Examples of an integrated active fiber optic temperature measuring device are disclosed. The integrated temperature measuring device comprises a fiber optic probe and an optoelectronic circuitry integrated into a single device which is then individually calibrated. The fiber optic probe has a fiber bundle with an active material at the tip of the probe. The optoelectronic circuitry is connected to the fiber optic probe. The optoelectronic circuitry includes a light source configured to provide an excitation light to the active material, a detector to detect the emitted light, a processing unit configured to determine a temperature based on a change in an emission intensity at a single wavelength range or the change in intensity ratio of two or more wavelength ranges, a lifetime decay, or a shift in emission wavelength peak of the emitted light, and a calibration means configured to calibrate the integrated active fiber optic temperature sensor.

Abstract: Examples of a monolithic phosphor composite for measuring a parameter of an object are disclosed. The composite comprises a thermographic phosphor and a metal oxide material that are dried and calcinated at high temperatures to form a ceramic metal oxide phosphor composite. The ceramic metal oxide phosphor composite is used in an optical device for measuring the parameter of the measuring object. The device comprises a fiber optic probe with a light guide, a light source operatively coupled to the fiber optic probe to provide excitation light into the light guide, a monolithic ceramic metal oxide phosphor composite functionally coupled to a tip of the fiber optic probe, a sensor operatively coupled to the fiber optic probe to detect the emitted light and a processing unit functionally coupled to the sensor to process the emitted light.