Abstract: Systems and methods for determining the resonant frequencies of at least one axis of a two-axis resonant light scanner based on a measured resistance of at least a portion of one of the axes are disclosed. Precise knowledge of the resonant frequencies of each axis enables quasi-closed-loop operation of a light scanner, wherein the resonant frequencies of its axes can be periodically updated to ensure the proper drive frequencies are used. Furthermore, by determining the relationship between the measured resistance and scanner angle, calibration of the scanner is facilitated and even enabled at the wafer level during fabrication. In some cases, it also enables real-time monitoring of scanner position. Scanners in accordance with the present disclosure are suitable for use in any application that requires one or more reflective elements that can be scanned or steered in at least one dimension.

Abstract: Aspects of the present disclosure describe systems, methods, and structures that provide eye-tracking by 1) steering a beam of light through the effect of a microelectromechanical system (MEMS) onto a surface of the eye and 2) detecting light reflected from features of the eye including corneal surface, pupil, iris—among others. Positional/geometric/feature/structural information pertaining to the eye is determined from timing information associated with the reflected light.

Abstract: Aspects of the present disclosure describe systems, methods, and structures that provide eye-tracking by 1) steering a beam of light through the effect of a microelectromechanical system (MEMS) onto a surface of the eye and 2) detecting light reflected from features of the eye including corneal surface, pupil, iris—among others. Positional/geometric/feature/structural information pertaining to the eye is determined from timing information associated with the reflected light.

Abstract: Aspects of the present disclosure describe systems, methods, and structures that provide eye-tracking by 1) steering a beam of light through the effect of a microelectromechanical system (MEMS) onto a surface of the eye and 2) detecting light reflected from features of the eye including corneal surface, pupil, iris—among others. Positional/geometric/feature/structural information pertaining to the eye is determined from timing information associated with the reflected light.

Abstract: Aspects of the present disclosure describe systems, methods, and structures that provide eye-tracking by 1) steering a beam of light through the effect of a microelectromechanical system (MEMS) operating at a resonant frequency onto a corneal surface; and 2) detecting the light reflected from the corneal surface.