Abstract: An air-operated valve which can keep the impact at the time a valve part sits on a seat from causing material from shedding and thereby generating particles which contaminate a controlled fluid and thereby can maintain a high cleanliness of the controlled fluid, that is, an air-operated valve which is provided with a valve chamber body which has a valve chamber which forms a seat, a valve mechanism which is provided with a valve part which seals the seat and with a diaphragm in the valve chamber, and a housing body which houses a drive mechanism which uses working air to make the valve mechanism advance and retract to drive and control it to open and close the seat, the drive mechanism provided with a first piston, a first spring which biases the first piston, a second piston which is slidably housed in the housing body and slidably houses the first piston inside it and which pushes the first piston, and a second spring which biases the second piston, the spring force of the second spring being made larger th

Abstract: A constant flow valve not allowing a controlled fluid to remain standing in it and not contacting the controlled fluid except at diaphragms, enabling simple adjustment of differential pressure, and good in response, including a valve body, a valve action chamber and connecting channel formed at the valve body, a valve mechanism attached to the valve action chamber, and a restrictor provided at the connecting channel, wherein the valve action chamber is formed with a primary side fluid inlet port, valve seat, outlet port to the connecting channel, inlet port from the connecting channel, and secondary side fluid outlet port and wherein the valve mechanism is provided with a first diaphragm, a second diaphragm, and a third diaphragm moving together with a valve element, and a constant flow mixing method for effectively mixing a plurality of fluids using such constant flow valves.

Abstract: A flow rate sensor high in pressure resistance has a structure to facilitate the measurement of a minuscule differential pressure for measurement of a very small flow rate. A chamber (20) is defined into a primary chamber (21) and a secondary chamber (25) by two diaphragms (31, 32) arranged in an opposed relation to each other. A fluid is passed from the primary chamber to the secondary chamber through a bypass (35) having an orifice portion (40) thereby to generate a differential pressure. The load generated by the fluid pressure fluctuations received by the first and second diaphragms is detected as a difference of displacement by a load difference sensor (50) arranged between the first and second diaphragms thereby to detect the flow rate of the fluid. Displacement limiting members (61, 62) are provided for the diaphragms or the load difference sensor so that the displacement due to the fluid pressure fluctuations received by the first and second diaphragms may not exceed a predetermined amount.

Abstract: An injector is disclosed, in which the change in the internal pressure of each chamber is relaxed when a pressure application mechanism is reciprocating thereby to lengthen the service life of the component parts including a diaphragm portion.

Abstract: An injector is disclosed, in which the change in the internal pressure of each chamber is relaxed when a pressure application mechanism is reciprocating thereby to lengthen the service life of the component parts including a diaphragm portion.

Abstract: A back pressure control valve which accurately controls pressure of fluid on a primary side but is not affected by pressure variations on a secondary side. The back pressure control valve 10 has a first chamber 12, a second chamber 14, a flow path 16 with a valve seat 17, a valve mechanism 20 with a rod portion 21 with a valve portion 22, a first diaphragm 30 within the first chamber which is provided with a first pressure adjusting mechanism M1, and a second diaphragm 40 within the second chamber which is provided with a second pressure adjusting mechanism M2.

Abstract: A tube connecting structure C1 including a gasket member 10 having annular, tub recesses 12, 13 tube members 20, 30 having folded edge portions 22, 32 formed by folding ends thereof over the outer circumference so that convex ends 23, 33 are brought into tight contact with the annular recesses of the gasket member, outer rings 40, 50 mounted onto the outer circumference of body portions 21, 31 of the respective tube members 20, 30 so that front ends 41, 51 are located behind the convex ends of the folded edge portions and rear ends 42, 52 are out of the folded edge portions, presser members 60, 70 having contact sections 61, 71 with the gasket member and outer ring pressing sections 62, 72 for pushing the rear ends of the outer rings toward the mating outer ring, and a clamp member 80 for compressing the respective presser members together with the gasket member.

Abstract: A tube connecting structure C1 including a gasket member 10 having annular, tub recesses 12, 13 tube members 20, 30 having folded edge portions 22, 32 formed by folding ends thereof over the outer circumference so that convex ends 23, 33 are brought into tight contact with the annular recesses of the gasket member, outer rings 40, 50 mounted onto the outer circumference of body portions 21, 31 of the respective tube members 20, 30 so that front ends 41, 51 are located behind the convex ends of the folded edge portions and rear ends 42, 52 are out of the folded edge portions, presser members 60, 70 having contact sections 61, 71 with the gasket member and outer ring pressing sections 62, 72 for pushing the rear ends of the outer rings toward the mating outer ring, and a clamp member 80 for compressing the respective presser members together with the gasket member.

Abstract: A first pressure chamber and a second pressure chamber are provided with means for continuously exerting a constant inward pressure on a first diaphragm part and a third diaphragm part respectively. A valve chamber having a flow control portion wherein a flow rate of the controlled fluid flowing from an inflow chamber to an outflow chamber is controlled by changing a size of the opening defined between a valve part and a valve seat, caused by a displacement of the valve part of a valve mechanism. A differential pressure chamber connects with the outflow chamber and has a bypass opening of a bypass passage connecting to the outflow passage.