Abstract: The present invention relates to a method for forming a uniform protective outer coating of pyrolytic graphite on a graphite chuck which is used for supporting a started filament in the manufacture of carbon free polycrystalline silicon.
Type:
Grant
Filed:
November 13, 1991
Date of Patent:
January 11, 1994
Assignee:
Advanced Ceramico Corporation
Inventors:
Michael H. Gilbert, John B. Hedge, Paul J. Walsh