Abstract: A touch panel system includes micro-electro-mechanical system (MEMS) groups. Each group includes an emitter producing a beam, and a MEMS mirror located about a corner of a touch panel screen. The MEMS mirror reflects the beam to create a beam sweep across a touch panel surface. An array of photo sensors is located parallel to an edge of the touch panel screen to detect reflected beams from an object about the touch panel surface. Based on when the reflected beams are detected, the angular positions of the MEMS mirrors can be determined and correlated to the object's position.

Abstract: A two-dimensional electrostatic scanner with distributed springs is disclosed. The two-dimensional electrostatic scanner comprises a frame, a mirror, one or more first-directional comb drives, two or more second-directional comb drives, four or more first-directional springs, and two or more second-directional springs. The four or more first-directional springs may connect to different electrical voltage source or electrical ground.

Abstract: A micro-electromechanical systems (MEMS) magnetometer includes first fixed electrodes, second fixed electrodes, a mobile element to rotate about a first rotation axis along a first direction and translate along a second direction orthogonal to the first direction, mobile electrodes extending from the first mobile element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a rotation element coupled to the mobile element to rotate about a second rotation axis along the second direction, the rotation element having a surface opposite the second fixed electrodes to form second sensor assemblies, the second fixed electrode being displaced from the surface of the rotation element along a third direction, and a trace having sections along the first direction and offset from the first rotation axis and along the second direction and offset from the second rotation axis.

Abstract: A method for forming semiconductor devices with wafer-level packaging (WLP) includes providing a silicon-on-insulator (SOI) substrate, forming a mask on a silicon layer of the SOI substrate, etching the silicon layer through openings in the mask to form elements initially bonded to but later released from an insulator layer of the SOI substrate, bonding a support substrate to the silicon layer, depositing metal over through holes in the support substrate to contact the silicon layer, and singulating the semiconductor devices from the bonded SOI substrate and the support substrate. The support substrate defines depressions opposite the elements so the elements are not bonded to the support substrate. Each semiconductor device includes a hermetically sealed package having a portion of the SOI substrate and a portion of the support substrate.

Abstract: A touch panel system includes a panel, first and second scanning mirrors located about first and second panel corners, a photodetector array along a first panel edge between the first and the second panel corners, and a stationary plane mirror along a second panel edge adjacent to the first panel edge. The first scanning mirror sweeps a light beam across the panel. The second mirror sweeps another light beam across the panel, a part of which reflects from the stationary plane mirror to back into the panel to sweep the panel from a different angle. The light beams, including the reflected part from the stationary plane mirror, strike objects on the panel and reflect towards the photodetector array. Angular positions of the first and the second scanning mirrors at the times the photodetector array detects the reflected light are correlated to object locations.

Abstract: A micro-electromechanical systems (MEMS) inertial sensor includes first, second, and third fixed electrodes, a first translational element to translate along a first direction, first mobile electrodes extending from the first translation element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a second translation element to translate along a second direction, second mobile electrodes extending from the second translation element and being interdigitated with the second fixed electrodes to form second sensor assemblies, and a rotation element to rotate about the second direction, the rotation element having a surface opposite the third fixed electrodes to form third sensor assemblies, wherein the third fixed electrode being displaced from the surface of the rotation element along a third direction.

Abstract: Two methods of fabricating a MEMS scanning mirror having a tunable resonance frequency are described. The resonance frequency of the mirror is set to a particular value by mass removal from the backside of the mirror during fabrication.

Abstract: A micro-electromechanical systems (MEMS) magnetometer includes first fixed electrodes, second fixed electrodes, a mobile element to rotate about a first rotation axis along a first direction and translate along a second direction orthogonal to the first direction, mobile electrodes extending from the first mobile element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a rotation element coupled to the mobile element to rotate about a second rotation axis along the second direction, the rotation element having a surface opposite the second fixed electrodes to form second sensor assemblies, the second fixed electrode being displaced from the surface of the rotation element along a third direction, and a trace having sections along the first direction and offset from the first rotation axis and along the second direction and offset from the second rotation axis.

Abstract: A micro-electromechanical (MEMS) switch includes a substrate, stationary actuator comb teeth extending from a stationary actuator pad supported above the substrate, stationary contact comb teeth extending from a stationary contact pad supported above the substrate, and a body suspended over the substrate for rotation about an axis perpendicular to the substrate. The body includes movable actuator comb teeth interdigitated in-plane with the stationary actuator comb teeth where the shortest distance between adjacent movable and stationary actuator comb teeth has a first value. The body further includes movable contact comb teeth interdigitated in-plane with the stationary contact comb teeth where the shortest distance between adjacent movable and stationary contact comb teeth has a second value smaller than the first value.

Abstract: A vacuum sealing process of a micro-electrical-mechanical-system (MEMS) package is provided. Solder is applied to the rimmed bottom of a lid for the package. A micro-electro-mechanical system (MEMS) device is attached to a substrate for the package. Solder is applied to a lipped top of the substrate. The lid and the substrate are sealed in an elevated temperature and vacuum environment.

Abstract: A touch screen display includes a screen, a bezel around the screen, and a MEMS package located within the bezel. The MEMS package comprises a MEMS scanning mirror and the top of the MEMS package is located below the top of the screen. At rest, a reflecting surface of the MEMS scanning mirror is parallel or slightly tilted relative to the screen but not substantially perpendicular to the screen. The display further includes a fixed mirror located in the bezel above the MEMS scanning mirror.

Abstract: A battery has a battery case with a hole, and a micro-electro-mechanical system (MEMS) safety valve mounted to the battery case over the hole. The MEMS safety valve includes a silicon diaphragm and a silicon electrode layer with a movable electrode mounted above the diaphragm, a stationary electrode around the movable electrode, and one or more links electrically connecting the movable and the stationary electrodes. The stationary electrode, the links, and the movable electrode form part of an electrical path between one or more battery cells and a battery terminal. The links break to open the electrical path when the pressure in the battery case pushes the diaphragm and the links past a first limit. The diaphragm breaks to release fluid from the battery case when the pressure pushes the diaphragm past a second limit. The first limit may be smaller, larger, or the same as the second limit.

Abstract: A micro-electro-mechanical system (MEMS) actuator assembly includes a mirror and four actuators. Each actuator includes a lever pivotable about a fulcrum axis. The inner end of each lever is coupled to one side of the mirror. Force is applied to one outer end of the levers to move one side of the mirror, which positions the mirror in one of four positions. Force is applied to two outer ends of the levers to move two sides of the mirror, which positions the mirror in one of four additional positions.

Abstract: A micro-electro-mechanical system (MEMS) pressure sensor includes a silicon spacer defining an opening, a silicon membrane layer mounted above the spacer, a silicon sensor layer mounted above the silicon membrane layer, and a capacitance sensing circuit. The silicon membrane layer forms a diaphragm opposite of the spacer opening, and a stationary perimeter around the diaphragm and opposite the spacer. The silicon sensor layer includes an electrode located above the diaphragm of the silicon membrane layer. The capacitance sensing circuit is coupled to the electrode and the silicon membrane layer. The electrode and the silicon membrane layer move in response to a pressure applied to the diaphragm. The movement of the silicon membrane layer causes it to deform, thereby changing the capacitance between the electrode and the silicon membrane layer by an amount proportional to the change in the pressure.

Abstract: A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.

Abstract: A sensor includes at least one stationary pad with comb teeth, a hub, at least one actuator spoke coupled to a location on the hub, and at least one sensing spoke extending from the hub. The sensing spokes have comb teeth generally interdigitated with the comb teeth of the stationary pad. The location of the coupling between the actuator spoke and the hub offsets a line of action of a force on the actuator spoke from a center of rotation of the hub.

Abstract: A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a uniaxial actuator rotatively coupled to the frame where the rotational axis of the actuator is offset from the rotational axes of the mirror and the frame. Another MEMS mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.

Abstract: A micro-electro-mechanical system (MEMS) mirror system has an actuator that imparts a motion with a first periodic movement of high frequency superimposed a second periodic movement of low frequency to a frame and a mirror coupled to the frame so that the mirror rotates about two axes. The mirror is coupled by springs to the frame so the mirror is rotatable about a first axis. The frame has pivots each coupled by springs to actuators so the frame is rotatable about a second axis. The mirror has a first resonant frequency and the frame including the mirror has a second resonant frequency. The low frequency of the second periodic movement is equal to one of the first and the second resonant frequencies, and the high frequency of the first periodic movement is equal to the other one of the first and the second resonant frequencies.

Abstract: A micro-electro-mechanical system (MEMS) mirror device includes a mirror coupled to an actuator by a first torsional hinge along a rotational axis. The actuator has a body and a group of coils extending from the body. An anchor is coupled another end of the actuator by a second torsional hinge along the rotational axis.

Abstract: A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a silicon wafer to form a first support layer having asymmetric pads. The backside of the silicon wafer is etched to form a top layer with a mirror, beam structures extending from the mirror, and rotating comb teeth extending from the beam structures. Before or after the backside of the silicon wafer is etched, the topside of the silicon wafer is bonded to a glass wafer that forms a second support layer. Prior to bonding the silicon wafer to the glass wafer, the glass wafer may be etched to form a recess and/or a cavity that accommodates mobile elements in the silicon wafer. Due to the asymmetry of the pads in the first support layer below the rotating comb teeth in the top layer, oscillation can be initiated.