Abstract: A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

Abstract: A compact heat exchanger for interchanging thermal energy between at least two fluids, one of which fluids may be a refrigerant in hot or cold form or in a liquid/vapor phase, and another of which fluids is a thermal transfer fluid. The heat exchanger may incorporate an internal heating element. The thermal transfer fluid is transported between two concentric metal tubes, while the refrigerant moves along a tubing helically wrapped about or between the tubes and is in thermal contact therewith.

Abstract: A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

Abstract: Systems and methods for heat exchange in accordance with the invention define adequately long-interchange distances for two fluids by wrapping a tube containing a first fluid about the wall of an inner cylindrical tank, within a gap formed with a second concentric tank. A second fluid is transmitted in the space defined between the turns of the tube and the two walls, providing effective short length thermal interchange through the tube walls. The tube is in the line contact with both tank walls and the fluids can flow rapidly over an adequately long length, so that high efficiency is provided in a low cost system.

Abstract: A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.

Abstract: A system and method for controlling a critical process variable, such as the temperature of one or more temperature control units for cluster tools in a semiconductor fabrication facility, uses dual interrelated PID) algorithms for interrelated but at times separate control of heating capabilities. The temperature control units operate with high power efficiency, because no heating energy is expended during cooling and non-transition modes. When approaching a temperature threshold, however, the heating algorithm is reinstated just long enough to provide minimum undershoot and enabling precise, low per consuming, steady state control at ±0.1° C., minimizing undershoot and enabling precise steady state control at ±0.1° C.

Abstract: The problem of controlling the temperature of the different units in a process tool system which have to be cooled or heated using thermal transfer fluid at selected setpoints and flow rates is resolved by a system having multiple modular units each with some operative and form factor commonality but at least dual functional capability. The modular units each have separate recirculation loops for thermal transfer fluid but cool the fluid using refrigeration cycles or facilities water supplies or heat the fluid using compressed hot gases or electrical energy. By employing operative units which can be internally varied to provide different thermal capacities within form factor constraints, the system enables concurrent temperature control needs of a number of different units to be met with an energy efficient, low footprint, highly adaptable system.

Abstract: A motor/pump system which uses an enclosed rotor shell, and also interior hydrodynamic bearings which are lubricated by the liquid being pumped, is arranged to minimize localized heating at the bearings to vaporization levels under high load conditions. To this end output pressure from the pump, which varies with load, is communicated into the rotor interior, without bulk fluid transfer. The increased pressure raises the vaporization temperature, automatically adjusting it with increased load to maintain the hydrodynamic bearing effect.

Abstract: A long life rotor pump combination of the type having a liquid filled rotor that uses the liquid being pumped to establish hydrodynamic bearings within the rotor incorporates a pump which can be expanded to include more than one impeller, providing an optionally higher flow rate. Thermal isolation between the motor housing and the pump housing is assured by restricting heat conductivity through the physical structures and through the liquid. The rotor enclosure is formed with a number of engaging but not joined elements maintained under compression established by forces exerted in securing the encompassing motor housing.

Abstract: The problem of controlling the temperature of the different units in a process tool system which have to be cooled or heated using thermal transfer fluid at selected setpoints and flow rates is resolved by a system having multiple modular units each with some operative and form factor commonality but at least dual functional capability. The modular units each have separate recirculation loops for thermal transfer fluid but cool the fluid using refrigeration cycles or facilities water supplies or heat the fluid using compressed hot gases or electrical energy. By employing operative units which can be internally varied to provide different thermal capacities within form factor constraints, the system enables concurrent temperature control needs of a number of different units to be met with an energy efficient, low footprint, highly adaptable system.

Abstract: A long life rotor pump combination of the type having a liquid filled rotor that uses the liquid being pumped to establish hydrodynamic bearings within the rotor incorporates a pump which can be expanded to include more than one impeller, providing an optionally higher flow rate. Thermal isolation between the motor housing and the pump housing is assured by restricting heat conductivity through the physical structures and through the liquid. The rotor enclosure is formed with a number of engaging but not joined elements maintained under compression established by forces exerted in securing the encompassing motor housing.

Abstract: A system and method for controlling the temperature of thermal loads which might be controlled by refrigeration at any temperature within a wide range from −40° C. to +120° C. employs a refrigeration loop with pressure and temperature sensitive shunt paths to provide stabilized refrigerant flow so that a thermal expansion valve can operate stably only with liquid refrigerant inputs. For efficiency, thermal energy is interchanged between refrigerant returning from thermal energy exchange with a thermal load such as a cluster tool used in semiconductor fabrication and counterflow pressurized liquid refrigerant that is to be expanded for heat exchange. If the input in a suction line to the compressor is too high in temperature, a portion of pressurized refrigerant for the thermal expansion valve that is being subcooled prior to feeding to the valve is diverted into counterflow relationship with the subcooling exchange.