Patents Assigned to Agilent Technologies Texas Instruments Incorporated
  • Patent number: 6548343
    Abstract: An embodiment of the instant invention is a method of fabricating a ferroelectric capacitor which is situated over a structure, the method comprising the steps of: forming a bottom electrode on the structure (124 of FIG. 1), the bottom electrode having a top surface and sides; forming a capacitor dielectric (126 of FIG. 1) comprised of a ferroelectric material on the bottom electrode, the capacitor dielectric having a top surface and sides; forming a top electrode (128 and 130 of FIG. 1) on the capacitor dielectric, the top electrode having a top surface and sides, the ferroelectric capacitor is comprised of the bottom electrode, the capacitor dielectric, and the top electrode; forming a barrier layer (118 and 120 of FIG.
    Type: Grant
    Filed: October 31, 2000
    Date of Patent: April 15, 2003
    Assignee: Agilent Technologies Texas Instruments Incorporated
    Inventors: Scott R. Summerfelt, Theodore S. Moise, Guoqiang Xing, Luigi Colombo, Tomoyuki Sakoda, Stephen R. Gilbert, Alvin L. S. Loke, Shawming Ma, Rahim Kavari, Laura Wills-Mirkarimi, Jun Amano