Abstract: A method for the preparation of very accurate measuring surfaces on measuring elements such as gauge blocks, surface plates, and the like. In one embodiment of the inventive method, the measuring surface is prelapped to a level of two to five microns below the desired final level. Thereafter, the surface is sputter coated with a hard ceramic or cermet layer with a thickness of three to ten microns, and finally the surface is lapped until the final desired level is reached. The invention also comprehends measuring elements made according to the novel method.