Patents Assigned to aLink M, Inc.
  • Apparatus for photoresist delivery
    Patent number: 6752599
    Abstract: A controller for a photoresist dispense pump is described that actively monitors the operation of the pump and dynamically determines completion of the refill of the pump. In one embodiment, pressure measurements are made during the refill step. Changes in the pressure measurements are used to indicate completion of the refill. After refill is completed, the refill step is terminated and the operation cycle is continued.
    Type: Grant
    Filed: June 11, 2001
    Date of Patent: June 22, 2004
    Assignee: aLink M, Inc.
    Inventor: Jino Park