Abstract: Lattice-mismatched epitaxial films formed proximate non-crystalline sidewalls. Embodiments of the invention include formation of facets that direct dislocations in the films to the sidewalls.
Type:
Application
Filed:
September 7, 2007
Publication date:
May 1, 2008
Applicant:
AmberWave Systems Coporation
Inventors:
Jie Bai, Ji-Soo Park, Anthony Lochtefeld