Abstract: One or more electron beam tubes are arranged to direct electron beams in air or other ambient gas toward a target object. The electron beams ionize air producing a plasma or glow discharge. An electric or magnetic field in the beam trajectory sustains the plasma by trapping secondary electrons formed by collisions of beam electrons with the ambient atmosphere. Target objects may be placed in the field for surface treatment, such as sterilization, or for thin film growth. In the latter case, the apparatus is enclosed in a housing and a reactive gas is introduced into the beam trajectory. The gas is one which is crackable by the electron beam or plasma, such as an organic silicon compound which would liberate silicon for combination with ionized oxygen to form silicon dioxide layers on a substrate.

Abstract: A sterilization apparatus wherein one or more electron beam tubes are used to direct electron beams into an ambient gaseous environment to create an electron plasma cloud into which non-sterile target objects may be moved. The electron plasma cloud is formed by interaction of the electron beam with the ambient atmosphere. Helium or other like gaseous may be used to expand the effective volume of the electron plasma cloud. Manipulators are used to move target objects in the electron plasma cloud, exposing non-sterile surfaces to the cloud and then joining the surfaces together where appropriate. The beam tube used to generate the electron beam has a thin low energy absorbing window which allows relatively low energy beams to be used, minimizing damage to materials within the surface of the target objects.

Abstract: An actinic radiation source (20) includes an anode (36) upon which an electron beam from a cathode ray gun (24) impinges. The anode (36) includes a window area (52) formed by a silicon membrane. The electron beam upon striking the anode (36) permeates the window area (52) to penetrate into medium surrounding actinic radiation source (20). A method for making an anode (36) uses a substrate having both a thin first layer (44) and a thicker second layer (46) of single crystal silicon material between which is interposed a layer of etch stop material (48). The second layer (46) is anisotropically etched to the etch stop material (48) to define the electron beam window area (52) on the first layer (44). That portion of the etch stop layer (48) exposed by etching through the second layer (46) is then removed. The anode (36) thus fabricated has a thin, monolithic, low-stress and defect-free silicon membrane electron beam window area (52) provided by the first layer of the substrate.

Abstract: A modular electron beam device is disclosed, the device being housed in a modular enclosure containing a power supply subsystem coupled to provide power to an electron beam tube. The enclosure is shaped to permit stacking of plural such modular units in a way that the stripe-shaped beam emitted from each of the units completely irradiates a surface to be treated. Beams may lie on different lines but the combined beams sweep out a width on a surface which is a continuous span. In an alternate embodiment of the invention, the modular unit comprises a plurality of electron beam units, each comprising an electron tube and a filament and bias supply to power the tube. A single high voltage stack is common to the plural tube/filament/bias sub-units. A daisy-chain arrangement allows for the single high voltage stack to power all of the tube units. In yet another embodiment, the modular unit comprises a plurality of electron tubes powered by a single power supply.

Abstract: An electron beam device has a cathode that generates a fan-shaped electron beam. A first focusing lens includes first and second plates on opposed sides of a filament. The edges of the plates closest to a positively charged anode are arcuate, so that as individual electrons are accelerated normal to the edge of the charged plates, the beam increases in length with departure from the filament. A second focusing lens includes third and fourth plates on opposed sides of the first focusing lens. Each of the third and fourth plates has an arcuate edge proximate to the positively charged anode. The plates of the first and second focusing lenses provide focusing in a widthwise direction, while defining the increase in the lengthwise direction. Preferably, the filament is also curved. In the preferred embodiment, the curvature of the plates of the first focusing lens defines a common radius with the plates of the second focusing lens.

Abstract: A vacuum tube electron beam device having a thin, single crystal, electron permeable, gas impermeable membrane for electron transmission and methods for making such a device. Single crystal membranes can have small thickness due to high strength, are highly transmissive to free electrons due to that small thickness. The ordered crystalline structure of such membranes provides minimal obstructions to electron beams, and yet is highly impermeable to penetration by gas and liquid molecules. Single crystals are anisotropically etched to precise membrane dimensions, and can also be etched to provide microchannel structures for flowing cooling fluid across the membrane during use. A doped silicon anode can provide support for the membrane with matching thermal expansion characteristics, and a crystalline anode can be integral with the membrane. A double membrane embodiment confines the cooling fluid so that it passes close to both membranes.

Abstract: An electron beam device having a plurality of individual, electron permeable, gas impermeable windows can produce a broad beam of free electrons. A multiplicity of windows allows each of the windows to be stronger, yet thinner, for greater electron permeability and durability. Having multiple windows also allows each window to be formed as a single crystal film, which can have superior strength and electron permeability, and which is difficult to form in a large area and easy to damage when so formed. In addition, having multiple windows allows a window end of the device and the beam which exits from that end to have configurations not easily achieved with a single window. Should a pinhole develop in one of the windows, it may be possible to seal the pinhole and re-evacuate the device, thereby extending the lifetime of the device. A current monitor is used to determine whether the electron beam passes through the windows or is absorbed in a surrounding face plate.

Abstract: An array of electron beam tubes is mounted on a conductive plate for projecting stripe-like electron beams through air onto a substrate beneath the plate. The tubes each have a narrow beam window formed by a very thin low-Z film layer, supported by silicon and sealing the tube against ambient pressure. Such windows produce low beam attenuation and allow low extraction voltages to be used, thereby reducing beam energy which would otherwise be lost by penetration through a surface to be treated. The stripe-like output electron beam segments may be formed into a linear beam track so that the entire widthwise extent of a surface, such as a sheet or web, may be treated by electron beam irradiation or the beam segments may be formed into any desired composite beam pattern. In another embodiment the stripe-like output beam segments may be arranged in an array to treat a circular circumferential surface, such as a cable.

Abstract: A pulsed surface discharge apparatus for treating dielectric surfaces, such as polymers, having a pair of electrodes spaced apart adjacent to a surface to be treated, means for supplying an inert gas, or a predominantly inert gas mixture, adjacent to the surface in the region between the electrodes, an electric pulse generator providing repeated pulses of a high voltage to the electrodes sufficient to cause breakdown of the inert gas and generate a discharge across the surface to be treated, and a dielectric surface transport for moving the surface to be treated past the electrodes. The electrodes and inert gas may be enclosed within a treatment chamber having entrance and exit ports for the material to be treated, and adapted for wire, rod, tube, sheet or other forms of dielectric material. One embodiment encloses the supply of dielectric material, which material drags inert gas along with to the discharge region.

Abstract: A wide area electron gun in which an electron beam originates from secondary emission electrons emitted by a target bombarded by ions. A cylindrical main housing has a central region where the secondary emission target is located and auxiliary housings on opposed sides of the target, outside of the main housing, contain low temperature ion plasmas. Ion beams are extracted from peripheral regions of the plasmas and enter narrow ports or slits connecting the auxiliary housings with the main housing. A higher pressure in the auxiliary housings, compared to the main housing, supports ion flow into the main housing. The ion beams have a low angle of incidence to the plane of the target and may be either slightly below or above the target. In the case the beam enters from above the target, the target is segmented, like venetian blinds. The secondary electrons exit the main housing through a foil window such that the electron beam is almost at right angles to the ion beams.

Abstract: An array of electron beam tubes is mounted on a conductive plate for projecting strip-like electron beams through air onto a substrate beneath the plate. The tubes each have a narrow beam window formed by a very thin low-Z film layer, supported by silicon and sealing the tube against ambient pressure. Such windows produce low beam attenuation and allow low extraction voltages to be used, thereby reducing beam energy which would otherwise be lost by penetration through a surface to be treated. The stripe-like output electron beam segments may be formed into a linear beam track so that the entire widthwise extent of a surface, such as a sheet or web, may be treated by electron beam irradiation or the beam segments may be formed into any desired composite beam pattern. In another embodiment the stripe-like output beam segments may be arranged in an array to treat a circular circumferential surface, such as a cable.