Patents Assigned to Applied Materials GmbH & Co. KG
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Patent number: 7754015Abstract: This invention relates to a vacuum vapor-deposition apparatus for forming vapor-deposited films on a base film, thereby to produce vapor-deposited films, and also to a method of producing vapor-deposited films. In the vacuum vapor-deposition apparatus, the synchronizing means equalizes the circumference velocity v1 of the coating roll and the circumference velocity v2 of the takeup guide roll. Hence, v1=v2. Therefore, the takeup guide roll never rubs the vapor-deposited layer provided on the surface of the film. This eliminates the possibility that the vapor-deposited layer has scratches. The vapor-deposited layer can therefore possess desired properties.Type: GrantFiled: June 21, 2005Date of Patent: July 13, 2010Assignees: Toppan Printing Co., Ltd., Applied Materials GmbH & Co. KGInventors: Noboru Sasaki, Hiroshi Suzuki, Fumitake Koizumi, Nobuhiko Imai, Kunimasa Arai, Hiroyuki Konagai
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Patent number: 7727632Abstract: The invention relates to a coating for temperable substrates, in particular of glass panes. This coating comprises for example directly on the substrate an Si3N4 layer, thereon a CrN layer, thereon a TiO2 layer and lastly an Si3N4 layer.Type: GrantFiled: April 3, 2004Date of Patent: June 1, 2010Assignee: Applied Materials GmbH & Co. KG.Inventors: Gerd Kleideiter, Anton Zmelty, Armin Reus, Manfred Ruske, Michael Geisler
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Publication number: 20100108505Abstract: In a vacuum-coating machine (1), the drive unit (6) is mounted compliantly to the chamber housing (3) by means of an elastic intermediate plate (14), such that said drive unit can follow a wobbling motion imposed by the rotary cathode (10), with the support bearing (19) of the free end of the rotary cathode (18) capable of being of a rigid design.Type: ApplicationFiled: January 11, 2010Publication date: May 6, 2010Applicant: APPLIED MATERIALS GMBH & CO. KGInventor: Andreas Sauer
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Patent number: 7651774Abstract: The invention relates to a glass coating and a method for the production of this glass coating. The glass coating comprises a first layer of ZnO and a second layer of Ag disposed thereon. Before the Ag layer is applied onto the ZnO layer, the latter is irradiated with ions.Type: GrantFiled: December 13, 2004Date of Patent: January 26, 2010Assignee: Applied Materials GmbH & Co., KGInventors: Gerd Kleideiter, Anton Zmelty, Michael Geisler
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Patent number: 7638173Abstract: A method for the operation of an in-line coating configuration comprising 2n+1 chambers, where n is an integer, and specifically is preferably 2. Thus, at least between two times two chambers of this installation one gate each can be opened and closed, it is possible to coat also overdimensioned substrates with the same installation. The opening and closing of the gates entails a change of the pressure courses in comparison to standard operation.Type: GrantFiled: March 22, 2004Date of Patent: December 29, 2009Assignee: Applied Materials GmbH & Co. KGInventors: Holger Richert, Manfred Weimann
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Patent number: 7594970Abstract: A web coating apparatus with a vacuum chamber (1) has between a rear wall (18) and at least one removable closing plate (22), housing member (20) with a planar cover (10), and at least one guide roll (12, 13, 14, 15) and a coating cylinder (9) with an axle (A) and at least one coating source (39a, 39b, 39c) are arranged in the vacuum chamber (1). To reduce structural height and width and to achieve an easily viewable and controllable web path while avoiding particle formation in the reach of the coating cylinder (9), provision is made pursuant to the invention that the ends of the at least one guide roll (12, 13, 14, 15) and of the coating cylinder are affixed by supporting elements (16, 17 and 19) with bearings to the cover (10) and that the cavity in the vacuum chamber (1) under the coating cylinder (9) is kept free of supporting elements.Type: GrantFiled: February 23, 2004Date of Patent: September 29, 2009Assignee: Applied Materials GmbH & Co. KGInventors: Stefan Hein, Peter Skuk
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Patent number: 7575662Abstract: The invention relates to a method for operating a magnetron sputter cathode, in particular a tube cathode or several tube cathodes forming an array. In such cathodes a target passes through a magnetic field, whereby induction currents flow in the target which distort the magnetic field. This results in the nonuniform coating of a substrate. By having the relative movement between magnetic field and target alternately reverse its direction, the effect of the magnetic field distortion can be compensated. This yields greater uniformity of the coating on a substrate to be coated.Type: GrantFiled: June 29, 2005Date of Patent: August 18, 2009Assignee: Applied Materials GmbH & Co. KGInventors: Stefan Bangert, Wolfgang Buschbeck, Markus Hanika, Karl-Albert Keim, Michael Konig, Jorg Krempel-Hesse, Andreas Lopp, Harald Rost, Jurgen Schroeder, Tobias Stolley
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Publication number: 20090199767Abstract: The invention relates to a vacuum treatment plant comprising an evaporator (1) for vacuum coating facilities. The evaporator (1) according to the invention comprises a device for guiding a supply line (4) movable in a gripping direction (A) and intended for gripping and positioning an evaporation boat (3) having a base (22) and further comprises two spacers (18, 19) which the movable supply line (4) flexibly connects to the base (22), with the spacers (18, 19) being disposed on one side each with the movable supply line (4) and with the other side on the base (22), thus enabling the first supply line (4) to be forcibly guided, and with the spacers (18, 19) having such a length and configuration between the first supply line (4) and the base (22) that the guidance direction (B) is essentially parallel to the gripping direction (A) at least across a small deflection range of the spacers (18, 19).Type: ApplicationFiled: July 27, 2005Publication date: August 13, 2009Applicant: Applied Materials GmbH & Co. KGInventors: Stefan Hein, Wolfgang Klein
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Publication number: 20090195865Abstract: The invention relates to an infrared radiation reflecting layer system for panes of glass and similar, the properties of said layer system being maintained even after heat treatment, for example, for bending or hardening the panes of glass. Silver is used as the infrared radiation reflecting layer. A combination of NiCrOx and Zn(Al)Ox is used as a lower-layer blocker for the silver. Also, a stoichiometric layer is also used as a pre-blocker layer. A specific work point is selected for a first dielectric layer of TiOxNy. Harmonisation of the thickness of the layers and the degrees of oxidation of NiCrOx and ZnAlOx as double lower-layer blockers and the work point of the TiOxNy-base layer are important for the temperability of the coating.Type: ApplicationFiled: February 15, 2007Publication date: August 6, 2009Applicant: APPLIED MATERIALS GMBH & CO. KGInventors: Gerd Kleideiter, Michael Geisler, Udo Schreiber, Sven Schramm
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Patent number: 7531071Abstract: A magnetic arrangement for a planar magnetron, in which an initial magnetic pole encompasses a second magnetic pole. This magnetic arrangement is moved linear in longitudinal direction to a target by a specific value and then moved back in opposite direction by the same value. In one version, an additional perpendicular motion is effected. The magnet arrangement is designed so that north and south pole interlock and waviform racetracks are generated. This enables constant sputtering from the entire target surface.Type: GrantFiled: March 20, 2006Date of Patent: May 12, 2009Assignee: Applied Materials GmbH & Co. KG.Inventors: Thomas Deppisch, Andreas Lopp
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Patent number: 7518142Abstract: The present invention concerns a thin-film encapsulation structure for electronic devices with organic substances, especially OLEDs or other organic optoelectronic devices as well as corresponding components and a process for the production with a primary, inorganic barrier layer (5), which is directly arranged on the device or the surface to be encapsulated; a planarization layer (6) arranged on the primary, inorganic barrier layer, the thickness of said planarization layer selected such that it is thicker than the simple value of the distance between highest peak and deepest valley of the surface of the primary barrier layer or the surface of the device under the primary barrier layer or the surface to be encapsulated, as well as a secondary barrier layer (14) arranged on the planarization layer.Type: GrantFiled: June 12, 2007Date of Patent: April 14, 2009Assignee: Applied Materials GmbH & Co. KGInventors: Uwe Hoffmann, Jose Manuel Dieguez-Campo, Frank Stahr, Klaus Schade
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Patent number: 7479712Abstract: The invention relates to a configuration for several consumers of electric energy, with these consumers having either the same electric power or different electric powers. Since, as a rule, not all consumers need to be supplied simultaneously with electric energy, for example if, due to maintenance work, some are not in operation, a modular energy supply system is provided, which is comprised of several interconnectable modules. This makes it possible for each consumer to be supplied from small units with the power it requires.Type: GrantFiled: October 27, 2003Date of Patent: January 20, 2009Assignee: Applied Materials GmbH & Co. KG.Inventors: Holger Richert, Wolfgang Morbe
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Patent number: 7477385Abstract: The present invention relates to a method of determining physical properties of an optical layer or layer system by means of spectral transmission and/or reflection measurements, whereby in accordance with the spectrum of the transmission and/or reflection measurement, reference values for the wavelength-dependent refractive indices n0 and/or extinction coefficients k0 are chosen from known values or are determined experimentally and the variation that characterizes the layer is described by wavelength-independent variation constants Kn and Kk for the refractive indices and extinction coefficients.Type: GrantFiled: August 30, 2005Date of Patent: January 13, 2009Assignee: Applied Materials GmbH & Co. KGInventors: Hans-Georg Lotz, Jürgen Schroeder
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Patent number: 7450233Abstract: A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.Type: GrantFiled: November 24, 2004Date of Patent: November 11, 2008Assignee: Applied Materials GmbH & Co. KGInventors: Hans-Georg Lotz, Peter Sauer, Stefan Hein, Peter Skuk
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Patent number: 7413639Abstract: The invention relates to an energy and media connection module for coating installations. Said module serves for supplying with cooling water, compressed air, process gases, signal, control and cathode power. It can be moved from one coating chamber to another coating chamber along a coating line by a single person in a short time. Further, it is possible to separate the energy connection module from a coating chamber for maintenance or displacement purposes without mechanically demounting all connections.Type: GrantFiled: May 26, 2004Date of Patent: August 19, 2008Assignee: Applied Materials GmbH & Co. KGInventors: Guido Hattendorf, Gert Rödling, Gerhard Rist
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Patent number: 7414738Abstract: The invention relates to a measuring device for measuring the degree of transmission of a coating on a glass plate. The glass plate rests on a support relative to which it is shifted. The support is provided with a gap enabling a light beam to pass through the glass plate and to impinge on a light receiver. Thus, the degree of transmission of the coating can be determined. Further, the reflection and the electric resistance of the coating can be measured by the measuring device.Type: GrantFiled: July 1, 2004Date of Patent: August 19, 2008Assignee: Applied Materials GmbH & Co. KG.Inventor: Jürgen Schröder
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Publication number: 20080190765Abstract: The invention relates to a magnetron with a planar target and a planar magnet system. The planar magnet system comprises a bar-shaped first magnet pole with enlarged ends and a frame-shaped second magnet pole, wherein a relative movement between the magnet poles and the target is such that every point of the magnet system moving with the target being stationary moves on a circular path. If the magnet system is stationary, each point of the target moves on such a circular path. During the relative movement with respect to one another the magnet system and the target are in parallel planes. The diameter of the circular path corresponds to the mean distance between two parallel arms of a plasma tube, which during the sputter operation develops between the first and the second magnet pole. Thereby that the magnets in the curve region of the plasma tube are disposed such that the pole lines form at this site a circle arc or a circular area, holes in the target are avoided.Type: ApplicationFiled: June 4, 2005Publication date: August 14, 2008Applicant: Applied Materials GmbH & Co.KGInventors: Andreas Lopp, Manfred Ruske
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Publication number: 20080044166Abstract: Embodiments of the present invention relate to a vaporizer apparatus with automatic feeding of a wire into a crucible. All of the parts of this vaporizer apparatus are mounted on only one carrier plate, such that a rapid mounting or dismounting, for example in clean rooms, is possible without particles being generated. In addition, a helical heating element is encompassed by a protective tube such that this helical heating element does not come into contact with the material to be vaporized.Type: ApplicationFiled: August 10, 2007Publication date: February 21, 2008Applicant: APPLIED MATERIALS GmbH & CO. KGInventors: Ulrich Englert, Guido Hattendorf, Michael Schafer
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Publication number: 20070290201Abstract: The present invention concerns a thin-film encapsulation structure for electronic devices with organic substances, especially OLEDs or other organic optoelectronic devices as well as corresponding components and a process for the production with a primary, inorganic barrier layer (5), which is directly arranged on the device or the surface to be encapsulated; a planarization layer (6) arranged on the primary, inorganic barrier layer, the thickness of said planarization layer selected such that it is thicker than the simple value of the distance between highest peak and deepest valley of the surface of the primary barrier layer or the surface of the device under the primary barrier layer or the surface to be encapsulated, as well as a secondary barrier layer (14) arranged on the planarization layer.Type: ApplicationFiled: June 12, 2007Publication date: December 20, 2007Applicant: Applied Materials GmbH & Co. KGInventors: Uwe Hoffmann, Jose Dieguez-Campo, Frank Stahr, Klaus Schade
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Publication number: 20070283885Abstract: The invention relates to a device for the vaporization of materials with a vaporizer tube or the like, which includes at least one discharge port for the vaporized material. The vaporizer tube is connected with a vapor distributor and comprises at least two separately heatable vaporizer units. In the vaporizer tube are provided an upper and a lower piston, which are separated by a gap. The at least two separate vaporizer units encompass at least the lower and/or the upper piston in the form of tongs.Type: ApplicationFiled: June 1, 2007Publication date: December 13, 2007Applicant: APPLIED MATERIALS GMBH & CO. KGInventor: Guido Hattendorf