Patents Assigned to ASM Intenational N.V.
  • Metal anneal with oxidation prevention
    Patent number: 6679951
    Abstract: The invention relates generally to the prevention of copper oxidation during copper anneal processes. In one aspect of the invention, copper oxidation is prevented by carrying out the anneal in the presence of one or more organic reducing agents.
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: January 20, 2004
    Assignee: ASM Intenational N.V.
    Inventors: Pekka J. Soininen, Kai-Erik Elers, Ernst H. A. Granneman