Abstract: An integrated device includes a lower layer pattern on a semiconductor substrate. The lower layer pattern includes a first region including first electrical devices and a second region including second electrical devices and electrically nonconductive dummy devices. A first device density of the first electrical devices in the first region is substantially greater than a second device density of the second electrical devices in the second region. A partially-planarizing dielectric layer is disposed on the lower layer pattern so as to cover the first electrical devices, the second electrical devices, and the electrically nonconductive dummy devices. The average height of the partially-planarizing dielectric layer in the first region is approximately the same as the average height in the second region. Through-holes are formed in the first region, and an electrically conductive material is disposed in the through-holes.