Abstract: A gas flow can be provided together with a liquid jet guided laser beam to remove accumulated liquid on the processing surface. The gas flow can be configured to have minimum interference with the liquid jet guided laser beam, while functions to blow away liquid generated by the liquid jet. Keeping the surface free from accumulated liquid can improve the efficiency of the liquid jet guided laser processing.

Abstract: Disclosed is a laser beam processing device, the main part of which is a coupling device (1) for coupling a focused laser beam (2) into a fluid jet (3) of a defined cross-section. The coupling device (1) comprises a housing (4), in which a fluid nozzle is configured for forming the fluid jet (3). In addition, an outlet opening (6) is provided in the housing, through which the fluid jet (3) exits from the housing (4) and the cross-section of which is larger than the cross-section of the fluid jet (3). A passage chamber is provided between the fluid nozzle (5) and the outlet opening (6) for the fluid jet (3).

Abstract: A gas flow can be provided together with a liquid jet guided laser beam to remove accumulated liquid on the processing surface. The gas flow can have minimum interference with the liquid jet guided laser beam, while functions to blow away liquid generated by the liquid jet. Keeping the surface free from accumulated liquid can improve the efficiency of the liquid jet guided laser processing.

Abstract: A liquid-jet-guided laser system can be used to generate functional slots having different depth and sidewall profiles by applying active control of laser beam parameters. Blinds slots can be processed onto a workpiece, such as a tire mold or a turbine vane, for an insertion of a sipe or a sealing element, respectively. Through slots can also be processed onto a workpiece, such as a turbine element for cooling during operation or a semiconductor wafer for singulation purpose. The processing of the workpiece can include a two-step procedure, wherein the first step comprises a pre-cut. The pre-cut cuts a contour outline of a slot onto a workpiece corresponding to an element that is to be inserted into the slot. The second step comprises a removal cut to remove excess workpiece material in between the contour outline. The liquid-jet-guided laser system can employ multiple-wavelength processing of a multiple-material workpiece.

Abstract: Reliable coupling of a high-power laser beam into a liquid-jet in a liquid-jet guided laser system can be achieved with high lifetime performance of the nozzle and the protection window, through setting the parameters of the liquid-jet guided laser system according to an optimum relationship that links the focus point of the laser, the focus cone angle, the laser beam energy distribution profile and the nozzle geometry.

Abstract: A removably attached coupling assembly can be used to be attached to a laser focus optic assembly of a liquid jet guided laser system. The coupling assembly can include a coupling body, a window assembly, and a nozzle assembly. The coupling assembly thus can allow the independent and separate servicing of the window and the nozzle. For example, to service the window, the coupling assembly can be first detached from the laser focus optic assembly, exposing the top portion of the coupling assembly. The window assembly then can be detached from the coupling assembly. The window can be removed from the window assembly for servicing, such as being repaired or replaced.

Abstract: A liquid-jet-guided laser system can be used to generate functional slots having different depth and sidewall profiles by applying active control of laser beam parameters. Blinds slots can be processed onto a workpiece, such as a tire mold or a turbine vane, for an insertion of a sipe or a sealing element, respectively. Through slots can also be processed onto a workpiece, such as a turbine element for cooling during operation or a semiconductor wafer for singulation purpose. The processing of the workpiece can include a two-step procedure, wherein the first step comprises a pre-cut. The pre-cut cuts a contour outline of a slot onto a workpiece corresponding to an element that is to be inserted into the slot. The second step comprises a removal cut to remove excess workpiece material in between the contour outline. The liquid-jet-guided laser system can employ multiple-wavelength processing of a multiple-material workpiece.