Patents Assigned to Axchlisrtechnologies, Inc.
  • Patent number: 6291828
    Abstract: An electrostatic quadrupole lens assembly (60) is provided for an ion implanter (10) having an axis (86) along which an ion beam passes, comprising: (i) four electrodes (84a-84d) oriented radially outward from the axis (86), approximately 90° apart from each other, such that a first pair of electrodes (84a and 84c) oppose each other approximately 180° apart, and a second pair of electrodes (84b and 84d) also oppose each other approximately 180° apart; (ii) a housing (62) having a mounting surface (64) for mounting the assembly (60) to the implanter, the housing at least partially enclosing the four electrodes (84a-84d); (iii) a first electrical lead (104) for providing electrical power to the first pair of electrodes (84a and 84c); (iv) a second electrical lead (108) for providing electrical power to the second pair of electrodes (84b and 84d); and (v) a plurality of electrically insulating members (92) formed of a glass-like material, comprising at least a first electrically insulating member for
    Type: Grant
    Filed: December 21, 1999
    Date of Patent: September 18, 2001
    Assignee: Axchlisrtechnologies, Inc.
    Inventors: Kourosh Saadatmand, David R. Swenson, William F. DiVergilio, Stephen M. Quinn, Zhimin Wan, Victor M. Benveniste