Patents Assigned to AXIC Inc.
  • Apparatus for the measurement of the thickness and concentration of elements in thin films by means of X-ray analysis
    Patent number: 4959848
    Abstract: A device which measures both the thickness of a thin film and the concentration of selected elements within the thin film. An X-ray source is utilized to irradiate the thin film sample and two detectors, an energy dispersive detector and a wavelength dispersive detector, provide the film thickness and element concentration measurements respectively.
    Type: Grant
    Filed: December 16, 1987
    Date of Patent: September 25, 1990
    Assignee: AXIC Inc.
    Inventor: Lubomir Parobek