Patents Assigned to Balzers Akteingesellschaft
  • Patent number: 5038044
    Abstract: In order to utilize a magnet arrangement having a magnetic flux density field for beam guidance in the deflection of a beam of monopolar charged particles, regions of the field having curved field lines, are modified to significantly linearize the field lines in the area of the beam. An additional flux density field is superimposed on the primary flux density field so that the field lines interact in an harmonic synthesis and so that the field lines of the resulting field in the region of interest, extend linearly. In this way, the deflection force on the beam is essentially independent of the beam position in the field direction and in the linearized region.
    Type: Grant
    Filed: September 4, 1990
    Date of Patent: August 6, 1991
    Assignee: Balzers Akteingesellschaft
    Inventors: Urs Wegmann, Albert Koller