Abstract: A method and system for performing swept-wavelength measurements within an optical system incorporating a reference resonator provides improved operation in resonator-enhanced optical measurement and data storage and retrieval systems. The system includes an illumination subsystem, an illumination coupler for producing a measurement beam and a reference beam from an output of the optical illumination source, a reference resonator for receiving the reference beam, a measurement resonator for receiving the measurement beam, at least two detectors, one optically coupled to the reference resonator and one optically coupled to the measurement resonator, and a time-domain measurement system coupled to the detectors for comparing detected optical signals received from the resonators. The detected signal from the reference resonator is used to compensate or detect variations in the wavelength of the illumination system, improving the resolution and accuracy of the measurement provided by the measurement resonator.

Abstract: A method and system for performing swept-wavelength measurements within an optical system provides improved operation in resonator-enhanced optical measurement and data storage and retrieval systems. The system includes an illumination subsystem having a swept-wavelength mode, a detection subsystem, an interferometer or an optical resonator interposed in an optical path between the illumination subsystem and the detection subsystem and a time domain analysis subsystem. Multiple resonance points of the optical resonator are detected by the time-domain subsystem when the illumination subsystem is in the swept-wavelength mode in order to determine resonator or interferometer characteristic changes. The resulting information can be used directly as a measurement output, or cavity length information may also be used to adjust the operating wavelength of a constant wavelength mode of the illumination subsystem.

Abstract: A method and system for controlling resonance within a resonator-enhanced optical system provides improved tracking performance in resonator-enhanced optical measurement and data storage and retrieval systems. The system includes an illumination subsystem and a detection subsystem with an optical resonator interposed in an optical path between the illumination subsystem and the detection subsystem. The resonance of the optical resonator is tuned, either by changing the wavelength of the illumination subsystem or the geometric path length within the resonator. Closed-loop feedback control signals can thereby maintain resonance at a desired operating point. The feedback control signal components can be further used to provide measurement data if the resonance of the optical resonator is a function of a measured surface, such as when a reflective surface of the resonator is a surface under measurement.

Abstract: An optical inspection method and apparatus having an enhanced height sensitivity region and roughness filtering uses a Fabry-Perot cavity to increase the phase detection sensitivity for light reflected from surface defects having a height above a predetermined level. A partially reflective surface is inserted between an illumination subsystem and a surface under inspection. The position of the partially reflective surface with respect to the surface under inspection is adjusted to provide both filtering of defects below the predetermined level and enhance sensitivity for a region of defect heights above the predetermined level. The angular resolution of the inspection system is improved, providing far-field inspection that can detect small-profile defects having unacceptable heights. Media storage, semiconductor wafer and other precision surface manufacture may be improved by use of the techniques of the present invention.

Abstract: An optical storage method and apparatus having enhanced resolution uses a Fabry-Perot cavity to narrow a beam used for reading data stored on media. The method and apparatus achieve an enhanced resolution due to the reduction of beam size and the increased slope of the beam profile in a beam used to illuminate physical changes in the media corresponding to data encoded in the media. The Fabry-Perot cavity may be included in a media for use with standard optical storage devices or may be external to the media, as part of an optical storage head for use with standard media.