Abstract: An optical filter array includes a substrate permeable to an electromagnetic radiation to be detected, a first DBR mirror arranged on the substrate, a second DBR minor arranged above the first DBR mirror, and a plurality of cavity sections. The cavity sections have different respective optical lengths, and are arranged so as to be spatially separated from each other between the first DBR mirror and the second DBR mirror. Each of the first DBR mirror, the second DBR mirror, and the plurality of cavity sections with different optical lengths form filter elements of a filter. The filter reflects in a stopband determined by the first DBR mirror and the second DBR mirror. Each filter element has at least one narrow transmission band determined by the optical length of its respective cavity section located inside the stopband. A different thicknesses of the cavity sections is provided via a nanoimprint process.
Type:
Grant
Filed:
December 3, 2013
Date of Patent:
January 26, 2016
Assignee:
BIOZOOM TECHNOLOGIES, INC.
Inventors:
Hartmut Hillmer, Wolfgang Koecher, Juergen Krieg, Carl Sandhagen, Hardy Hoheisel, Winfried Willemer
Abstract: An optical filter array includes a substrate permeable to an electromagnetic radiation to be detected, a first DBR mirror arranged on the substrate, a second DBR minor arranged above the first DBR mirror, and a plurality of cavity sections. The cavity sections have different respective optical lengths, and are arranged so as to be spatially separated from each other between the first DBR minor and the second DBR mirror. Each of the first DBR minor, the second DBR mirror, and the plurality of cavity sections with different optical lengths form filter elements of a filter. The filter reflects in a stopband determined by the first DBR mirror and the second DBR mirror. Each filter element has at least one narrow transmission band determined by the optical length of its respective cavity section located inside the stopband. A different thicknesses of the cavity sections is provided via a nanoimprint process.
Type:
Application
Filed:
December 3, 2013
Publication date:
June 5, 2014
Applicant:
Biozoom Technologies, Inc.
Inventors:
Hartmut Hillmer, Wolfgang Koecher, Juergen Krieg, Carl Sandhagen, Hardy Hoheisel, Winfried Willemer
Abstract: The invention relates to an optical filter and a method for its production, and to a device for the examination of the spectral and spatial distribution of an electromagnetic radiation irradiated from an object. The invention is based on the task of providing an optical filter of the above described type that is inexpensive to produce, which can be used to detect a plurality of wavelengths, in which, however, tuning of the DBR mirrors by means of displacement is not necessary. Furthermore, a method for the production of such a filter is provided.
Type:
Grant
Filed:
August 9, 2007
Date of Patent:
January 14, 2014
Assignee:
Biozoom Technologies, Inc.
Inventors:
Hartmut Hillmer, Wolfgang Koecher, Juergen Krieg, Carl Sandhagen, Hardy Hoheisel, Winfried Willemer