Patents Assigned to Board of Regents for Oklahoma Agriculture and Mechanical Colleges acting for and on behalf of Oklahoma State University of Agriculture and Applied Sciences
Abstract: A method of depositing a doped amorphous semiconductor on a base material including the steps of subjecting the base to an environment including a semiconductor gas such as silane or germane, a dopant gas such as arsine, phosphine, or diborane, and mercury vapor, and exposing the base in such environment to ultraviolet radiation to effect decomposition of the semiconductor and dopant materials onto the base.
Type:
Grant
Filed:
December 15, 1980
Date of Patent:
September 7, 1982
Assignee:
Board of Regents for Oklahoma Agriculture and Mechanical Colleges acting for and on behalf of Oklahoma State University of Agriculture and Applied Sciences