Abstract: A method and apparatus for performing data collection within a device is disclosed. A device steers a scanning probe in a continuous, non-raster pattern across a specimen. The specimen is supported by a stage, and data is collected in response to interaction between the probe and the specimen to form a data set. Spiral scanning patterns without turnaround regions are utilized in embodiments of the present invention, both with and without rounded corners in the scanning patterns.
Type:
Grant
Filed:
March 4, 2004
Date of Patent:
March 7, 2006
Assignee:
Board of Regents of the University and Community College System of Nevada, Reno
Inventors:
Nelson George Publicover, John Leonard Sutko