Abstract: A process for producing at least one photonic component (32, 33, 35, 39, 41), includes inserting the photonic component (32, 33, 35, 39, 41) into a surface layer (12) of a semiconductor wafer and/or within a semiconductor wafer, especially of a semiconductor chip (11, 31, 34, 38, 40) for the simpler and more cost-effective production with the most desired possible three-dimensional structures. At least one laser beam (22) is coupled into the material of the surface layer (12) and/or of the semiconductor wafer, in which the laser beam (22) is focused at a predetermined depth in the material. At least one property of the material and/or the material structure is changed in the area of focus (23, 36).
Type:
Grant
Filed:
September 20, 2012
Date of Patent:
January 20, 2015
Assignee:
BIAS Bremer Institut für angewandte Strahltechnik GmbH
Inventors:
Ralf Bergmann, Mike Bülters, Vijay Vittal Parsi Sreenivas
Abstract: A process for producing at least one photonic component (32, 33, 35, 39, 41), includes inserting the photonic component (32, 33, 35, 39, 41) into a surface layer (12) of a semiconductor wafer and/or within a semiconductor wafer, especially of a semiconductor chip (11, 31, 34, 38, 40) for the simpler and more cost-effective production with the most desired possible three-dimensional structures. At least one laser beam (22) is coupled into the material of the surface layer (12) and/or of the semiconductor wafer, in which the laser beam (22) is focused at a predetermined depth in the material. At least one property of the material and/or the material structure is changed in the area of focus (23, 36).
Abstract: A device for laser-optical generation of mechanical waves for processing and/or examining a body includes a laser light source for generation of laser light and a modulator, on which a generated laser light falls and with which, from an incident laser light, a predetermined laser light intensity distribution can be generated on or in the body, in such a way that mechanical waves are excited on or in the body, with which the body is processed and/or with which, via detection of said waves, the body can be examined. According to certain aspects of the invention, the modulator is formed as a diffractive optical element wherein a height profile structure is formed on the surface of the diffractive optical element, with which the phase of the incident laser light is varied, thus generating a predetermined laser light intensity distribution.
Abstract: The invention relates to a device and method for displaying a static or moving picture, wherein the inventive device comprises a laser light source and a screen and is characterized in that said screen has a structure at which the illuminated parts simultaneously reflect or transmit light in different directions inside a beam width.
Type:
Grant
Filed:
July 26, 2005
Date of Patent:
January 18, 2011
Assignees:
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V., Bremer Institut fur Angewandte Strahltechnik GmbH
Inventors:
Christoph Rickers, Matthias Fahland, Christoph Von Kopylow