Patents Assigned to Carl Zeiss Microscopy, LLC
  • Patent number: 8766210
    Abstract: Charged particle system are disclosed and include a first voltage source, a second voltage source electrically isolated from the first voltage source, a charged particle source electrically connected to the first voltage source, and an extractor electrically connected to the second voltage source. Methods relating to the charged particle systems are also disclosed.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: July 1, 2014
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Raymond Hill, John Notte, IV
  • Patent number: 8748845
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: January 24, 2012
    Date of Patent: June 10, 2014
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, John A. Notte, Louis S. Farkas, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • Patent number: 8669525
    Abstract: The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.
    Type: Grant
    Filed: May 26, 2009
    Date of Patent: March 11, 2014
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Sybren Sijbrandij, John Notte, IV, William B. Thompson
  • Patent number: 8648299
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods involve relatively light isotopes, minority isotopes or both. In some embodiments, an isotope of Neon is used.
    Type: Grant
    Filed: March 4, 2013
    Date of Patent: February 11, 2014
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, Sybren Sijbrandij
  • Patent number: 8633451
    Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: January 21, 2014
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, Colin A. Sanford, John Notte, IV, Alexander Groholski, Mark D. DiManna
  • Patent number: 8624185
    Abstract: Disclosed are methods for preparing samples that include forming a first channel in a material by directing a first plurality of noble gas ions at the material, forming a second channel in the material by directing a second plurality of noble gas ions at the material, where the second channel is spaced from the first channel so that a portion of the material between channels has a mean thickness of 100 nm or less, and detaching the portion from the material to yield the sample.
    Type: Grant
    Filed: September 15, 2011
    Date of Patent: January 7, 2014
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Diederik Jan Maas, Maria Rudneva, Emile van Veldhoven, Hendrik Willem Zandbergen
  • Patent number: 8563954
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: October 22, 2013
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV
  • Patent number: 8558192
    Abstract: Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×10?2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.
    Type: Grant
    Filed: October 19, 2011
    Date of Patent: October 15, 2013
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, John Notte, IV, Randall G. Percival
  • Publication number: 20130256532
    Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
    Type: Application
    Filed: May 13, 2013
    Publication date: October 3, 2013
    Applicant: Carl Zeiss Microscopy, LLC
    Inventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall G. Percival, Billy W. Ward
  • Patent number: 8461557
    Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
    Type: Grant
    Filed: June 13, 2008
    Date of Patent: June 11, 2013
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall Percival, Billy W. Ward
  • Patent number: 8455840
    Abstract: The disclosure relates to ion beams systems, such as gas field ion microscopes, having multiple modes of operation, as well as related methods. In some embodiments, the disclosure provides a method of operating a gas field ion microscope system that includes a gas field ion source, where the gas field ion source includes a tip including a plurality of atoms.
    Type: Grant
    Filed: October 19, 2011
    Date of Patent: June 4, 2013
    Assignee: Carl Zeiss Microscopy, LLC
    Inventor: Lawrence Scipioni