Abstract: Charged particle system are disclosed and include a first voltage source, a second voltage source electrically isolated from the first voltage source, a charged particle source electrically connected to the first voltage source, and an extractor electrically connected to the second voltage source. Methods relating to the charged particle systems are also disclosed.
Abstract: The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.
Type:
Grant
Filed:
May 26, 2009
Date of Patent:
March 11, 2014
Assignee:
Carl Zeiss Microscopy, LLC
Inventors:
Sybren Sijbrandij, John Notte, IV, William B. Thompson
Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods involve relatively light isotopes, minority isotopes or both. In some embodiments, an isotope of Neon is used.
Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).
Type:
Grant
Filed:
June 20, 2008
Date of Patent:
January 21, 2014
Assignee:
Carl Zeiss Microscopy, LLC
Inventors:
Billy W. Ward, Colin A. Sanford, John Notte, IV, Alexander Groholski, Mark D. DiManna
Abstract: Disclosed are methods for preparing samples that include forming a first channel in a material by directing a first plurality of noble gas ions at the material, forming a second channel in the material by directing a second plurality of noble gas ions at the material, where the second channel is spaced from the first channel so that a portion of the material between channels has a mean thickness of 100 nm or less, and detaching the portion from the material to yield the sample.
Type:
Grant
Filed:
September 15, 2011
Date of Patent:
January 7, 2014
Assignee:
Carl Zeiss Microscopy, LLC
Inventors:
Diederik Jan Maas, Maria Rudneva, Emile van Veldhoven, Hendrik Willem Zandbergen
Abstract: Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×10?2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.
Type:
Grant
Filed:
October 19, 2011
Date of Patent:
October 15, 2013
Assignee:
Carl Zeiss Microscopy, LLC
Inventors:
Billy W. Ward, John Notte, IV, Randall G. Percival
Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
Type:
Application
Filed:
May 13, 2013
Publication date:
October 3, 2013
Applicant:
Carl Zeiss Microscopy, LLC
Inventors:
Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall G. Percival, Billy W. Ward
Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
Type:
Grant
Filed:
June 13, 2008
Date of Patent:
June 11, 2013
Assignee:
Carl Zeiss Microscopy, LLC
Inventors:
Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall Percival, Billy W. Ward
Abstract: The disclosure relates to ion beams systems, such as gas field ion microscopes, having multiple modes of operation, as well as related methods. In some embodiments, the disclosure provides a method of operating a gas field ion microscope system that includes a gas field ion source, where the gas field ion source includes a tip including a plurality of atoms.