Abstract: An examining system for imaging an object positionable in an object plane, includes an illumination device for supplying energy to a delimited field of the object such that charged particles emerge from locations of the field, the field being displaceable in the plane of the object, a first deflector for providing a variable deflection field for guiding charged particles emerging from locations of a selectable region of the object through a fixed, predetermined beam cross-section, and a position-sensitive detector disposed in the beam path such that the charged particles, after having passed through the first deflector, impinge on the position-sensitive detector, wherein particles emerging from different locations of the region are imaged on different locations of the position-sensitive detector which are allocated to the locations of emergence.
Type:
Application
Filed:
July 1, 2002
Publication date:
April 10, 2003
Applicant:
Carl Zeiss Semiconductor Mfg. Technologies AG
Inventors:
Oliver Kienzle, Dirk Stenkamp, Michael Steingerwald, Rainer Knippelmeyer