Abstract: A thermal deformation error compensation method for a coordinate measuring machine creates thermal deformation and geometric error data at different ambient temperatures including temperatures and machine kinematic parameters to obtain a thermal deformation and geometric error model, and inputs the model into central control unit of the coordinate measuring machine, and converts a 3D error compensation to obtain a thermal deformation and geometric error compensation model, and uses the thermal deformation and geometric error compensation model for performing compensations, so as to complete a thermal deformation and geometric error compensation of the coordinate measuring machine.

Abstract: A three-dimensional measure device with air bearings includes a base member having a platform horizontally securely thereon. A bridge is slidably mounted on the platform and moved along a first dimension. The bridge includes a first support and a second support respectively supporting a horizontal portion of the bridge. A runner is slidably mounted on the horizontal portion and moved along a second dimension. A tubular shaft is reciprocally and moved received in the runner and moved along a three dimension. A probe is longitudinally movably received in the tubular shaft. The air bearings are mounted between two adjacent elements that are moved relative to each other. Each air bearing has a resilient member mounted and previously compressed therein to provide an act force to the air bearing for adjusting a gap between the two adjacent elements that are moved relative to each other.