Abstract: A liquid control apparatus that controls a spread of a liquid has a main body that has a supply subject surface onto which the liquid is supplied. The apparatus also has a mesh form body that is woven into a mesh form and provided to contact the supply subject surface. A heater that heats the supply subject surface is provided in an interior of the main body. A supply port is provided in the main body to supply the liquid from the interior of the main body to a part of the supply subject surface contacted by the mesh form body. A groove is provided in the supply subject surface to suppress spreading of the liquid from the supply port to a side opposite to the heater in an expanse direction of the supply subject surface.

Abstract: A target supply apparatus includes a tank for storing a liquid target material, a nozzle for outputting the liquid target material in the tank, and a gas supply source for supplying gas into the tank, and controls a gas pressure inside the tank with a pressure of the gas supplied from the gas supply source which is provided with a pressure regulator. The target supply apparatus also includes a pressure-decrease gas passage of which one end is connected to the tank and the other end forms an exhaust port, a pressure-decrease valve provided on the pressure-decrease gas passage, and a controller for controlling open/close of the pressure-decrease valve. The controller, when the target material is caused not to output from the nozzle, opens the pressure-decrease valve and decreases the pressure inside the tank.

Abstract: A diaphragm valve having a diaphragm valve element including a valve element body movable into contact with a valve seat, a web portion extending outward from the valve element body, and a fixed portion formed at an outer peripheral edge of the web portion. The web portion includes a vertical portion vertically formed continuous with the valve element body, a horizontal portion horizontally formed continuous with the fixed portion, and a connecting portion of a circular arc shape (an upward protruding shape) in section to connect the vertical portion with the horizontal portion, thereby holding the vertical portion in constant contact with an outer surface of a backup.

Abstract: A high-temperature gas control valve for controlling a flow of a high-temperature gas, includes a valve seat made of metal, a diaphragm made of metal, which is brought into contact with or separated from the valve seat by operation of an actuator, thereby opening and closing the valve. At least one of the diaphragm and the valve seat is coated with an amorphous-carbon film.

Abstract: In a vacuum pressure control system constituted of a vacuum vessel, a vacuum pump sucking gas in the vacuum vessel, a vacuum proportional opening and closing valve disposed on a pipe connecting the vacuum vessel and the vacuum pump, the vacuum proportional opening and closing valve changing its opening to change the vacuum pressure in the vacuum vessel, a pressure sensor to measure the vacuum pressure in the vacuum vessel and a vacuum pressure control device to control the opening of the vacuum proportional opening and closing valve based on the output of the pressure sensor, the vacuum proportional opening and closing valve is provided with a valve seat, a valve member with a tapered surface in its outer periphery and a pilot valve, the valve member being movable along a center line of the valve seat to change a clearance area between the valve seat and the tapered surface, and the vacuum pressure control device controls a servo valve to change the pressure of air to be supplied to the pilot valve based on t

Abstract: Disclosed is a rodless cylinder having a cylinder barrel with a slit formed axially therein. A piston is movably housed in the cylinder barrel. A mounting table is disposed movably along the external surface of the cylinder barrel and connected to the piston through the slit. An external actuator is mounted on the mounting table and designed to be driven by a pressure fluid. A passage, through which a pressure fluid can pass, is defined in the cylinder barrel. An inlet is provided in the cylinder barrel so as to introduce the pressure fluid in the passage to the mounting table side. An outlet is provided on the mounting table so as to supply the pressure fluid introduced from the inlet to the external actuator.

Abstract: In an on-line transaction network, in order to transmit to an administration center the custodial positions of commodities in each terminal transaction device and the contents of the commodities kept in custody thereat, the center is provided with a memory device in which a plurality of commodity patterns specifying the corresponding relations between the custodial positions of the commodities and the contents thereof are stored beforehand along with pattern codes affixed to the commodity patterns, and after the commodity has been put in the terminal transaction device in accordance with any of the commodity patterns, the pattern code indicative of the commodity pattern is sent to the center, whereby information for transaction administration is obtained.