Patents Assigned to CEBT Co., Ltd.
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Patent number: 9837245Abstract: Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.Type: GrantFiled: March 13, 2015Date of Patent: December 5, 2017Assignee: CEBT CO., LTD.Inventors: Ho Seob Kim, Byeng Jin Kim, Do Jin Seong
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Patent number: 8912506Abstract: Disclosed is a device for sustaining different vacuum degrees for an electron column, including an electron emitter, a lens part, and a housing for securing them, to maintain the electron column and a sample under different vacuum degrees. The device comprises a column housing coupling part coupled to the housing to isolate a vacuum; a hollow part defined through the center portion of the device to allow an electron beam emitted from the electron column to pass therethrough; and a vacuum isolation part having a structure of a gasket for vacuum coupling, wherein a difference of no less than 10 torr in a vacuum degree is maintained between both sides of the device by selecting an appropriate diameter of a lens electrode layer which is finally positioned in a path along which the electron beam is emitted or by using the hollow part.Type: GrantFiled: February 2, 2007Date of Patent: December 16, 2014Assignee: CEBT Co., Ltd.Inventor: Ho Seob Kim
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Patent number: 8173978Abstract: Provided is a method for controlling electron beams in a multi-microcolumn, in which unit microcolumns having an electron emitter, a lens, and a deflector are arranged in an n×m matrix. A voltage is uniformly or differentially applied to each electron emitter or extractor. The same control voltage or different voltages are applied to a region at coordinates in a control division area of each extractor to deflect the electron beams. Lens layers not corresponding to the extractors are collectively or individually controlled so as to efficiently control the electron beams of the unit microcolumn. Further, a multi-microcolumn using the method is provided.Type: GrantFiled: July 5, 2005Date of Patent: May 8, 2012Assignee: Cebt Co., LtdInventors: Ho Seob Kim, Byeng Jin Kim
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Patent number: 8071955Abstract: The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).Type: GrantFiled: May 15, 2008Date of Patent: December 6, 2011Assignee: Cebt Co. Ltd.Inventors: Ho Seob Kim, Young Chul Kim
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Patent number: 8071944Abstract: Provided is a portable electron microscope using a microcolumn. The portable electron microscope includes a microcolumn, a low vacuum pump, a high vacuum pump, an ultra-high vacuum ion pump, a first chamber for receiving and fixing the microcolumn and a sample to be measured and forming a vacuum by means of the pumps, a controller, and a case for receiving the pumps, the chamber and the controller.Type: GrantFiled: September 1, 2005Date of Patent: December 6, 2011Assignee: Cebt Co. Ltd.Inventors: Ho Seob Kim, Byeng Jin Kim
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Patent number: 8044351Abstract: The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.Type: GrantFiled: May 29, 2006Date of Patent: October 25, 2011Assignee: Cebt Co. LtdInventors: Ho Seob Kim, Byeng Jin Kim
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Patent number: 7968844Abstract: Disclosed herein is an apparatus and method for inspecting the via holes of a semiconductor device using electron beams. The apparatus includes electron beam irradiation means, a current measuring means, and a current measuring means and data processing means. The electron beam irradiation means radiate respective electron beams to inspect a plurality of inspection target holes. The current measuring means measures current, which is generated by irradiating the electron beams, radiated from the electron beam irradiation means, through a conductive layer located under the holes, or through the conductive layer and a separate detector. The data processing means processes data acquired through the measurement of the current measuring means.Type: GrantFiled: April 3, 2007Date of Patent: June 28, 2011Assignee: CEBT Co. Ltd.Inventor: Ho Seob Kim
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Patent number: 7902521Abstract: The present invention relates to a method for improving focusing in an electron column that generates an electron beam. The method for controlling the focusing of an electron beam in according to the present invention reduces the spot size of the electron beam when the electron beam reaches a specimen, so that resolution can be increased and the line width of a pattern in a semiconductor lithography process can be reduced, with the result that the performance of the electron can be improved.Type: GrantFiled: December 5, 2006Date of Patent: March 8, 2011Assignee: Cebt Co. Ltd.Inventors: Ho Seob Kim, Seung Joon Ahn, Dae Wook Kim, Young Chul Kim
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Patent number: 7750295Abstract: The present invention provides a new extractor for a micro-column and an alignment method of the aperture of the extractor and an electron emitter for a micro-column. Further, the present invention provides a measuring system, a method for measuring, and an alignment method using the principle of the alignment.Type: GrantFiled: December 30, 2003Date of Patent: July 6, 2010Assignee: Cebt Co., Ltd.Inventors: Ho Soeb Kim, Seung Joon Ahn, Dae Wook Kim
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Publication number: 20100163745Abstract: Disclosed therein is a housing for micro-column, which can easily align and assemble the micro-column and improve stability of the micro-column. The housing for manufacturing micro-column including an electron emitter, deflectors, and lenses, the housing includes: an electron emitter holder in which the electron emitter is inserted; a holder base in which the electron emitter holder is inserted; and a column base coupled with the holder base, whereby the electron emitter can be aligned and fixed between the electron emitter holder and the holder base in X- and Y-axial directions via bolts and socket set screws inserted into the tap holes.Type: ApplicationFiled: February 23, 2006Publication date: July 1, 2010Applicant: CEBT CO. LTD.Inventors: Ho Seob Kim, Byeng Jin Kim
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Publication number: 20100019166Abstract: Provided is a method for controlling electron beams in a multi-microcolumn, in which unit microcolumns having an electron emitter, a lens, and a deflector are arranged in an n×m matrix. A voltage is uniformly or differentially applied to each electron emitter or extractor. The same control voltage or different voltages are applied to a region at coordinates in a control division area of each extractor to deflect the electron beams. Lens layers not corresponding to the extractors are collectively or individually controlled so as to efficiently control the electron beams of the unit microcolumn. Further, a multi-microcolumn using the method is provided.Type: ApplicationFiled: July 5, 2005Publication date: January 28, 2010Applicant: CEBT Co. Ltd.Inventors: Ho Seob Kim, Byeng Jin Kim
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Publication number: 20080210866Abstract: Provided is motioning equipment which provides relative motion between electron column emitting electron beam and a sample on which the electron beam is irradiated. The motioning equipment includes multi-microcolumn for emitting electron beams on the sample, supports for supporting the multi-microcolumns, and driving means for driving the supports to move the multi-microcolumns.Type: ApplicationFiled: September 1, 2005Publication date: September 4, 2008Applicant: CEBT Co. Ltd.Inventors: Ho Seob Kim, Byeng Jin Kim
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Patent number: 7329878Abstract: The present invention provides a method for manufacturing a lens assembly of a microcolumn having a plurality of microlenses and a plurality of insulating layers alternately interposed between the microlenses. The method includes forming at least one first microlens assembly set (set—1) by anodic-bonding an insulating layer (101) and a microlens (102) together; layering a second microlens assembly set (set—2) on the first microlens assembly set (set—1); and scanning a laser beam, thus welding the first microlens assembly set (set—1) to the microlens of the second microlens assembly set (set—2). The method of the present invention further includes anodic-bonding the microlens assembly sets together.Type: GrantFiled: July 24, 2004Date of Patent: February 12, 2008Assignee: CEBT Co., Ltd.Inventor: Ho Seob Kim
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Publication number: 20060071175Abstract: The present invention provides a new extractor for a micro-column and an alignment method of the aperture of the extractor and an electron emitter for a micro-column. Further, the present invention provides a measuring system, a method for measuring, and an alignment method using the principle of the alignment.Type: ApplicationFiled: December 30, 2003Publication date: April 6, 2006Applicant: CEBT Co., Ltd.Inventors: Ho Kim, Seung Ahn, Dae Kim