Patents Assigned to Celerity Group, Inc.
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Patent number: 7114511Abstract: A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.Type: GrantFiled: March 29, 2005Date of Patent: October 3, 2006Assignee: Celerity Group, Inc.Inventors: John M Lull, Chiun Wang, William S Valentine, Joseph A Saggio, Jr.
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Patent number: 6962164Abstract: A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.Type: GrantFiled: April 24, 2002Date of Patent: November 8, 2005Assignee: Celerity Group, Inc.Inventors: John M. Lull, Chiun Wang, William S. Valentine, Joseph A. Saggio, Jr.
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Publication number: 20050223813Abstract: Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.Type: ApplicationFiled: June 8, 2005Publication date: October 13, 2005Applicant: Celerity Group, Inc.Inventors: John Lull, Chiun Wang, Joseph Saggio
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Publication number: 20050126306Abstract: A method of obtaining at least one representation of a characteristic function of a sensor from a test fluid during calibration of the sensor according to a sensor model having a transfer function operating on flow rate, at least one sensor property and at least one fluid property and employing the at least one representation of the characteristic function to determine flow rates through the sensor during operation with an arbitrary fluid.Type: ApplicationFiled: February 4, 2005Publication date: June 16, 2005Applicant: Celerity Group, Inc.Inventors: Chiun Wang, William Valentine, John Lull
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Publication number: 20050109771Abstract: A heater that includes a substantially flat layer of electrical resistance material having a first end and a second end, a first electrical conductor electrically connected to the first end of the substantially flat layer of electrical resistance material, a second electrical conductor electrically connected to the second end of the substantially flat layer of electrical resistance material, and an electrically insulating material surrounding the substantially flat layer of electrical resistance material and electrically insulating the first end of the substantially flat layer of electrical resistance material from the second end of the substantially flat layer of electrical resistance material. The heater may be mounted to a surface of a fluid component and used to heat the fluid component, and where the heater includes an aperture that extends through the electrically insulating material, the heater may be placed between a fluid component and a fluid substrate and used to heat both.Type: ApplicationFiled: November 5, 2004Publication date: May 26, 2005Applicant: Celerity Group, Inc.Inventors: Michael Bower, Roger Chase
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Publication number: 20050092077Abstract: A resistive bridge sensor circuit that includes a first resistive bridge circuit having a first variable resistance resistor and a second resistive bridge circuit having a second variable resistance resistor. The first and second resistive bridge circuits share at least a portion of a common reference leg that sets a resistance of a first and second variable resistors. The common reference leg or a portion of the common reference leg is alternately switchably connected to one of the first and second resistive bridge circuits.Type: ApplicationFiled: October 29, 2004Publication date: May 5, 2005Applicant: Celerity Group, Inc.Inventor: John Lull
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Patent number: 6845659Abstract: A resistive bridge sensor circuit that includes a first resistive bridge circuit having a first variable resistance resistor and a second resistive bridge circuit having a second variable resistance resistor. The first and second resistive bridge circuits share at least a portion of a common reference leg that sets a resistance of a first and second variable resistors. The common reference leg or a portion of the common reference leg is alternately switchably connected to one of the first and second resistive bridge circuits.Type: GrantFiled: July 16, 2003Date of Patent: January 25, 2005Assignee: Celerity Group, Inc.Inventor: John Michael Lull
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Patent number: 6826953Abstract: An apparatus and method for measuring flow. A flow sensor includes a sensor conduit and a bypass having at least one capillary tube. At least one of the length, inside diameter, and cross-sectional shape of the sensor conduit is substantially equal to the corresponding length, inside diameter, and cross-sectional shape of the at least one capillary tube.Type: GrantFiled: July 18, 2003Date of Patent: December 7, 2004Assignee: Celerity Group, Inc.Inventor: Chiun Wang
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Publication number: 20040200529Abstract: A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first predetermined portion of the flow of process fluid, and the at least one second fluid outlet provides the remaining portion of the flow of process fluid. In one embodiment, the control system includes a pressure transducer, first and second multipliers, and first and second flow controllers. The first multiplier multiplies a pressure signal received from the pressure transducer by a first setpoint to control a first flow controller that provides the first predetermined portion of the flow of process fluid. The second multiplier multiplies the pressure signal by a second setpoint to control a second flow controller that provides the remaining portion.Type: ApplicationFiled: April 27, 2004Publication date: October 14, 2004Applicant: Celerity Group, Inc.Inventors: John M. Lull, William S. Valentine
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Patent number: 6769463Abstract: The present application relates to fluid flow systems and more particularly to fluid flow systems for use in the semiconductor industry. In one embodiment, the present invention is directed to a fluid stick adapted to be mounted to a mounting surface. The fluid stick includes a first flow component positioned in the fluid stick and a second flow component positioned in the fluid stick between the first flow component and the mounting surface and in fluid connection with the first flow component.Type: GrantFiled: May 16, 2002Date of Patent: August 3, 2004Assignee: Celerity Group, Inc.Inventor: Kim Ngoc Vu
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Publication number: 20040129324Abstract: A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.Type: ApplicationFiled: August 26, 2003Publication date: July 8, 2004Applicant: Celerity Group, Inc.Inventor: Kim Ngoc Vu
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Patent number: 6752166Abstract: A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first predetermined portion of the flow of process fluid, and the at least one second fluid outlet provides the remaining portion of the flow of process fluid. In one embodiment the control system includes a pressure transducer, first and second multipliers, and first and second flow controllers. The first multiplier multiplies a pressure signal received from the pressure transducer by a first setpoint to control a first flow controller that provides the first predetermined portion of the flow of process fluid. The second multiplier multiplies the pressure signal by a second setpoint to control a second flow controller that provides the remaining portion.Type: GrantFiled: May 23, 2002Date of Patent: June 22, 2004Assignee: Celerity Group, Inc.Inventors: John M. Lull, William S. Valentine
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Publication number: 20040100289Abstract: A resistive bridge sensor circuit that includes a first resistive bridge circuit having a first variable resistance resistor and a second resistive bridge circuit having a second variable resistance resistor. The first and second resistive bridge circuits share at least a portion of a common reference leg that sets a resistance of a first and second variable resistors. The common reference leg or a portion of the common reference leg is alternately switchably connected to one of the first and second resistive bridge circuits.Type: ApplicationFiled: July 16, 2003Publication date: May 27, 2004Applicant: Celerity Group, Inc.Inventor: John Michael Lull
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Publication number: 20040074311Abstract: Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.Type: ApplicationFiled: July 17, 2003Publication date: April 22, 2004Applicant: Celerity Group, Inc.Inventors: John Michael Lull, Chiun Wang, Joseph A. Saggio