Abstract: Excimer laser annealing apparatus includes and excimer laser delivering laser-radiation pulses to a silicon layer supported on a substrate translated with respect to the laser pulses such that the consecutive pulses overlap on the substrate. The energy of each of the laser-radiation pulses is monitored, transmitted to control-electronics, and the energy of a next laser pulse is adjusted by a high-pass digital filter.

Abstract: A method is disclosed evaluating a silicon layer crystallized by irradiation with pulses form an excimer-laser. The crystallization produces periodic features on the crystallized layer dependent on the number of and energy density ED in the pulses to which the layer has been exposed. An area of the layer is illuminated with light. A microscope image of the illuminated area is made from light diffracted from the illuminated are by the periodic features. The microscope image includes corresponding periodic features. The ED is determined from a measure of the contrast of the periodic features in the microscope image.

Abstract: A xenon chloride (XeCl) excimer laser includes a lasing-gas mixture including a buffer gas, a noble gas, a halogen-donating gas, and deuterium. The deuterium is present in a concentration greater than about 10 parts-per-million.

Abstract: A method of evaluating a crystallized silicon layer on a substrate includes injecting light into the substrate in such a way that it is wave-guided by the substrate. Wave-guided injected light is diffracted out of the substrate by periodic features of the silicon layer. The diffracted light is detected and processed to evaluate the crystalline layer.

Abstract: An intra-cavity doubled OPS-laser has a laser-resonator including a birefringent filter (BRF) for coarse wavelength-selection, and an optically nonlinear (ONL) crystal arranged for type-II frequency-doubling and fine wavelength-selection. Laser-radiation circulates in the laser-resonator at one of a range of fundamental wavelengths dependent on the resonator length. The ONL crystal has a transmission peak-wavelength dependent on the crystal temperature. Reflection of circulating radiation from the BRF is monitored. The reflection is at a minimum when the ONL crystal transmission-peak wavelength is at the circulating radiation wavelength. The temperature of the ONL crystal is selectively varied to maintain the monitored reflection at about a minimum.

Abstract: In a master oscillator plus power amplifier (MOPA) system, the oscillator is a passively Q-switched laser. The laser is triggered into passively Q-switched operation by operating an optical switch to resonantly couple back into the laser amplified stimulated emission generated by the amplifier.

Abstract: An electro-optic modulator for a laser beam includes an yttrium vanadate crystal cooperative with a double-pass electro-optic switch. A beam to be modulated passes through the yttrium vanadate crystal and makes a forward and a reverse pass through the electro-optic switch. The electro-optic switch returns the beam to the vanadate crystal selectively in one of two polarization orientations at 90 degrees to each other. Depending on the polarization orientation, the returned beam is transmitted by the crystal along a corresponding one of two about-parallel paths spaced apart from each other.

Abstract: A method is disclosed evaluating a silicon layer crystallized by irradiation with pulses form an excimer-laser. The crystallization produces periodic features on the crystallized layer dependent on the number of and energy density ED in the pulses to which the layer has been exposed. An area of the layer is illuminated with light. A microscope image of the illuminated area is made from light diffracted from the illuminated are by the periodic features. The microscope image includes corresponding periodic features. The ED is determined from a measure of the contrast of the periodic features in the microscope image.

Abstract: A Q-switched solid-state laser has a neodymium-doped yttrium vanadate single-crystal gain-element in the form of a prism. The prism incorporates the functions of a gain-element, a polarizer, a resonator end-mirror and an output coupler.

Abstract: A method is disclosed evaluating a silicon layer crystallized by irradiation with pulses form an excimer-laser. The crystallization produces periodic features on the crystalized layer dependent on the number of and energy density ED in the pulses to which the layer has been exposed. An area of the layer is illuminated with light. A microscope image of the illuminated area is made from light diffracted from the illuminated are by the periodic features. The microscope image includes corresponding periodic features. The ED is determined from a measure of the contrast of the periodic features in the microscope image.

Abstract: A Faraday rotator includes two magnet sub-assemblies assemblies spaced apart and aligned with each other with a gap therebetween. Each magnet sub-assembly includes a central magnet magnetized in direction parallel to the gap. The central magnet is sandwiched between two end magnets magnetized in a direction perpendicular to the gap. A magneto-optic crystal is located in the gap between the central magnets.

Abstract: An intra-cavity frequency doubled OPS-laser includes a laser-resonator terminated by a plane mirror and a mirror-structure of an OPS-chip. The resonator is folded by three fold-mirrors. The fold-mirrors are supported on a vibration-isolation plate supported by isolation posts above a base-plate. The plane mirror and the mirror-structure of the OPS-chip are mounted back to back on opposite parallel surfaces of a mounting block. The mounting-block is supported on the base-plate and extends through an aperture in the vibration-isolation plate. Movement of the vibration-isolation plate with respect to the base-plate does not change the resonator length.

Abstract: A microcrystal laser for generating laser pulses has a laser resonator which has a laser medium arranged between two mirrors; and an arrangement for stabilizing the optical path length is provided. The laser resonator has a saturable absorber medium for pulse generation.

Abstract: A microcrystal laser for generating laser pulses has a laser resonator which has a laser medium arranged between two mirrors; and an arrangement for stabilizing the optical path length is provided. The laser resonator has a saturable absorber medium for pulse generation.

Abstract: A microcrystal laser for generating laser pulses has a laser resonator which has a laser medium arranged between two mirrors; and an arrangement for stabilizing the optical path length is provided. The laser resonator has a saturable absorber medium for pulse generation.