Abstract: A cryogenic liquid switching system including an electronic control mechanism; a solenoid valve communicatively connected to the electronic control mechanism via an interface cable; a gas input control connected to the solenoid valve; and a pair of pneumatic valve actuators connected to the gas input control via separate isolation tubing components The system also including a pair of valve actuator pins, one each connected to a respective one of the pair of pneumatic valve actuators; a pair of pneumatic valves, one each connected to a respective one of the pair of valve actuator pins; and a cryogenic liquid input in fluid communication with at least a portion of each of the pair of pneumatic valves.

Abstract: The present invention reduces corrosion rates on metal surfaces, such as the interior surfaces of gas flow control components by depositing a chemically inert layer on the metal surface of the component and other associated parts of the component that are exposed to corrosive gases. The disclosed method provides for depositing a relatively chemically inert thin film such as silicon dioxide along the gas exposed surface areas of the metal surface thereby enhancing corrosion protection to the metal surfaces. The present invention can be used to deposit a chemically inert thin film at locations inside components that are outside a direct line of sight and at locations normally unreachable by a gas flowing through the components. The present invention does not require a vacuum system for the deposition of the corrosion-resistant thin film.

Abstract: The present invention reduces corrosion rates on metal surfaces, such as the interior surfaces of gas flow control components by depositing a chemically inert layer on the metal surface of the component and other associated parts of the component that are exposed to corrosive gases. The disclosed method provides for depositing a relatively chemically inert thin film such as silicon dioxide along the gas exposed surface areas of the metal surface thereby enhancing corrosion protection to the metal surfaces. The present invention can be used to deposit a chemically inert thin film at locations inside components that are outside a direct line of sight and at locations normally unreachable by a gas flowing through the components. The present invention does not require a vacuum system for the deposition of the corrosion-resistant thin film.

Abstract: The present invention reduces corrosion rates on metal surfaces, such as the interior surfaces of gas flow control components by depositing a chemically inert layer on the metal surface of the component and other associated parts of the component that are exposed to corrosive gases. The disclosed method provides for depositing a relatively chemically inert thin film such as silicon dioxide along the gas exposed surface areas of the metal surface thereby enhancing corrosion protection to the metal surfaces. The present invention can be used to deposit a chemically inert thin film at locations inside components that are outside a direct line of sight and at locations normally unreachable by a gas flowing through the components. The present invention does not require a vacuum system for the deposition of the corrosion-resistant thin film.

Abstract: The present invention is directed to a mass flow controller having an automatic pressure compensator in the form of a dome loaded pressure regulator, wherein the dome loaded pressure regulator is, in turn, controlled by a dome-loading gas line regulated by a pilot pressure regulator. The pilot pressure regulator and the mass flow controller are advantageously controlled by a single microprocessor, and may advantageously all be mounted to a single manifold block.

Abstract: A gas flow control device is provided in which a regulator body has an inlet bore and an outlet bore extending therein, into which inlet and outlet sleeves having highly polished inner surfaces are secured, with the inlet and outlet sleeves further having connected thereto, at an exterior of the regulator body, connectors for an inlet line, an inlet pressure gauge, an outlet line and and outlet pressure gauge. The inlet and outlet sleeves are made of corrosion-resistant tubing, as are the connectors, in a preferred embodiment.

Abstract: A gas flow regulator valve is provided with a metering valve and filter assembly including a drawn, generally cup shaped, or hat shaped filter element having a substantially flat end panel, a generally cylindrical sidewall and an open end opposite the end panel. An integrally formed flange, or rim, is formed around the open end and projects outwardly therefrom to provide means for mounting the filter, in a fluid-tight relation, in the metering valve assembly body. The filter is formed from a substantially planar disc-shaped blank of a multilayered screen material in which the respective layers are welded, or sintered, to one another to form a rigid, porous filter medium. The blank is shaped by a cup drawing operation of a filter mesh made of layers of woven smooth, corrosion resistant, fine gauge, high strength metal.

Abstract: An improved fluid control valve assembly employing a needle valve integrally formed on a non-rotating valve stem includes a metering orifice for engaging and forming a fluid seal with the valve needle, and a generally radially extending end face on the valve stem for engaging an opposing wall surface acting to positively stop the valve stem upon fully closing the valve and forming a seal between the metering orifice and valve needle to thereby avoid excessive loads and wear between the metering orifice and valve needle.