Abstract: A method and an apparatus for removing impurities from a noble gas or nitrogen utilizing a single purifier vessel having three zones. In the first zone, the gas is preheated to a temperature greater than 200.degree. C.; in the second zone, the preheated gas is contacted with a getter material at greater than 335.degree. C. for removal of impurities such as methane and other hydrocarbons, water, carbon monoxide, nitrogen, oxygen, and carbon dioxide; in the third zone, the gas is contacted with a second getter material at a temperature greater than 150.degree. C. for removal of hydrogen. Hot gas exiting the purifier vessel is passed through a recuperative heat exchanger where the hot exiting gas preheats in-coming gas before it enters the first zone of the purifier vessel.

Abstract: A method and apparatus are disclosed showing a system for continuous purification of bulk source specialty gases to less than 10 part per billion levels. Corrosive and non-corrosive specialty gases are purified using this system. Depending on whether corrosive or non-corrosive gases are being purified and the contaminants of concern, the purification beds contain an absorber and/or getter. A dual bed system allows one bed to purify at ambient temperatures while a second bed undergoes regeneration, providing continuous purification for a bulk source specialty gas.