Abstract: In a surface voltmeter (1), a surface voltage on a measurement area on a semiconductor substrate (9) on which an insulating film is formed is measured while applying light to the measurement area. With this operation, a voltage induced on a main body of the substrate (9) by charge which is charged on a surface of the insulating film is balanced out. Consequently, it is possible to measure a surface voltage on the measurement area with high accuracy. Since an electrode wiring (164) used for application of an electrode voltage to an electrode (12) extends from the electrode (12) in a direction away from the substrate (9) along a vibration direction, it is possible to prevent influences of noises caused by vibration of the electrode wiring (164) in vibrating the electrode (12) and to measure the surface voltage on the measurement area more accurately.

Abstract: A control part comprises a division location setting part for setting a division location based on an image data; a scan start position setting part for setting scan start positions of recording heads based on the division location; an image data division part for dividing an image data by the division location; and a head movement control part for controlling movement of the recording heads. The division location setting part sets a division location in a blank area having no pixel to be recorded in the primary scanning direction, in the case of publication printing, in a center margin area between page data. Since the recording heads perform scanning concurrently their respective areas that are divided by the division location, no deterioration in image continuity occurs between the recording heads. This permits an image recorder, though having plural recording heads, capable of performing concurrent recordings without loss of continuity.

Abstract: An apparatus causes a substrate to rotate and supplies a treatment liquid to a substrate surface to make a treatment, without concern that a mixed substance is eluted from a cup in the use for a long time, or a thin film comes off from an inside wall surface to be contamination-causing substances even if the cup made of a water-repellent material for collecting a treatment liquid becomes hydrophilic. A cup 16 disposed to surround the sides and underside of a substrate W rotating while being held by a spin chuck 10, and serving to collect a treatment liquid diffused from the substrate to the surroundings, is made of a plastic material. Further, an inside wall surface of an upper-side cup part 24 of the cup 16, being a portion on which the treatment liquid having been diffused from the substrate impinges, is roughened to be a hydrophilic surface.

Abstract: A manufacturing method of a color filter is capable of achieving improvement in efficiency of use of materials and simplification in process, and forming highly accurate colored patterns.

Abstract: A spin coating apparatus for use in applying a coating solution in film form to an upper surface of a substrate. This apparatus includes a rotary table for spinning the substrate as supported thereon in horizontal posture, the rotary table having a size larger than an outline contour of the substrate, and an upper rotary plate disposed parallel to and slightly spaced from the upper surface of the substrate supported on the rotary table. The rotary table and upper rotary plate define a flat treating space therebetween, which treating space has peripheral openings for allowing superfluous part of the coating solution to scatter outwardly therefrom. A nozzle plate is disposed between the rotary table and the substrate supported thereon. The nozzle plate receives cleaning liquid supplied through a rotary shaft of the rotary table, and directs the liquid to the lower surface of the substrate.

Abstract: The present invention relates to a driving mechanism for turning a photosensitive drum in an electrophotographic copying machine, which is provided with a brake loading means to brake the turning force of the drum, and is characterized in that the brake loading means comprises a brake loading device for a power transmitting means arranged between the drum and a motor and a brake loading device for the drum.The former device applies a predetermined frictional braking force to the turning of at least one follower axis in the power transmitting means and eliminates adverse effects of backlashes existing between the motor and the follower axis with respect to the turning stability of the drum. The latter device eliminates adverse effects of backlashes existing between the follower axis and the drum as the same above.

Abstract: A positioning assembly comprises a base having a pair of taller projections and a pair of shorter projections on its surface. The positioning assembly is placed between a pair of belts which form a conveying assembly, so that the taller projections receive a sheet material which is conveyed along the belts. The positioning assembly is positioned at a middle position in which the taller projections project above the belts, whereby the taller projections receive the material. Receiving the material, the positioning assembly is elevated to a high position where all the projections including the shorter one project above the belts, whereby the material is held on the base. The material is processed with being rotated at the high position. Then the positioning assembly is lowered to a low position where all the projections are below the belts, whereby the material is delivered again onto the belts to be conveyed to the next process.