Patents Assigned to DANDAN CO., LTD.
  • Remote plasma generator using ceramic
    Patent number: 9773645
    Abstract: A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: September 26, 2017
    Assignees: SAMSUNG ELECTRONICS CO., LTD., DANDAN CO., LTD., NEW POWER PLASMA CO., LTD.
    Inventors: Ja-woo Lee, Chung-huan Jeon, Heok-jae Lee, Jang-hyoun Youm, Sang-jean Jeon, Kwang-young Jung, Sun-uk Kim, Kang-ho Lee, Jung-hyun Cho, Soon-im Wi, Yun-sik Yang, Moo-jin Kim, Jang-kyu Choi
  • REMOTE PLASMA GENERATOR USING CERAMIC
    Publication number: 20160307739
    Abstract: A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.
    Type: Application
    Filed: January 29, 2016
    Publication date: October 20, 2016
    Applicants: DANDAN CO., LTD., New Power Plasma Co., Ltd.
    Inventors: Ja-woo LEE, Chung-huan JEON, Heok-jae LEE, Jang-hyoun YOUM, Sang-jean JEON, Kwang-young JUNG, Sun-uk KIM, Kang-ho LEE, Jung-hyun CHO, Soon-im WI, Yun-sik YANG, Moo-jin KIM, Jang-kyu CHOI