Abstract: A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolysable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping.

Abstract: A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolyzable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO.sub.2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping.

Abstract: A metal phosphide composition is disclosed for generating a mixture of phosphine and diluent gas(es), presented ready for use in a hydrolysis process or apparatus in the form of a free-flowing particulate metal phosphide material composed of loose particles of said metal phosphide essentially free of metal phosphide dust, essentially free of hydrolysis retarding agents and essentially free of hydrophobic substances in the form of coatings or hydrophobizing additives. In use the hydrolyzable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine. The generated mixture of phosphine and inert carrier gas, e.g. CO.sub.2, can be used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation.