Abstract: An imaging target for characterization of an optical system has a structure, formed on a substrate, wherein the structure has a base level and has one or more staging surfaces spaced apart from the base level and disposed over a range of distances from the base level; and one or more localized light sources disposed along the one or more staging surfaces of the structure and configured to direct light through or from the structure.
Type:
Grant
Filed:
February 4, 2020
Date of Patent:
May 31, 2022
Assignee:
Double Helix Optics Inc.
Inventors:
Anurag Agrawal, Scott Gaumer, Warren Colomb