Abstract: A hybrid focal plane array has Hg.sub.1-x Cd.sub.x Te junction photodiodes formed in a substrate of HgCdTe which is capped by a layer of Te-rich CdTe. Type conversion of a low metal vacancy HgCdTe substrate to p-type is performed by annealing the capped substrate at a temperature sufficient to support interdiffusion between the Te-rich CdTe capping layer and the HgCdTe substrate. Use of the CdTe capping layer with a slight excess Te maintains the surface of the HgCdTe substrate in a Te-rich phase condition.
Type:
Grant
Filed:
September 28, 1999
Date of Patent:
September 5, 2000
Assignee:
DRS FPA, L.P.
Inventors:
John Harold Tregilgas, Arthur Monroe Turner
Abstract: A hybrid focal plane array has Hg.sub.1-x Cd.sub.x Te junction photodiodes formed in a substrate of HgCdTe which is capped by a layer of Te-rich CdTe. Type conversion of a low metal vacancy HgCdTe substrate to p-type is performed by annealing the capped substrate at a temperature sufficient to support interdiffusion between the Te-rich CdTe capping layer and the HgCdTe substrate. Use of the CdTe capping layer with a slight excess Te maintains the surface of the HgCdTe substrate in a Te-rich phase condition.
Type:
Grant
Filed:
August 13, 1993
Date of Patent:
February 29, 2000
Assignee:
DRS FPA, L.P.
Inventors:
John Harold Tregilgas, Arthur Monroe Turner