Patents Assigned to Electro Scientific Industries, Inc.
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Patent number: 9776906Abstract: An internal feature can be laser machined in strengthened glass sheets or panels by first laser machining a first scribe in a first surface proximate to the internal feature to be laser machined. The internal feature can be then laser machined by positioning a beam waist of a laser beam proximate to an opposite second surface by focusing the laser beam through the strengthened glass panel from the first surface. The internal feature is laser machined by repositioning the beam waist from the second surface to the first surface while removing material from a kerf surrounding the internal feature. When the laser beam waist is finally positioned proximate to the first surface material, the internal shape formed by the laser machining is easily and cleanly removed from the surrounding glass.Type: GrantFiled: March 28, 2014Date of Patent: October 3, 2017Assignee: Electro Scientific Industries, Inc.Inventors: Mathew Rekow, Yun Zhou, Nicolas Falletto
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Patent number: 9724782Abstract: Laser systems and methods insert a settling time before and after each tooling action. A peak AOD excursion generally occurs at the transition in velocity between inter-feature moves and tooling moves. This transition occurs both before tooling (on the approach to the tooling location) and after tooling (on the departure from the completed tooling location to the next location). By adding a settling delay on each end of the tooling period, the AOD excursion is allowed to settle to a lower value. This then allows higher inter-tooling velocities (for high throughput) while keeping the AOD travel excursion within the bounds of the system's AOD configuration.Type: GrantFiled: March 14, 2014Date of Patent: August 8, 2017Assignee: Electro Scientific Industries, Inc.Inventor: Mark A. Unrath
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Patent number: 9636713Abstract: A component handler (100) may include: a test plate (102) including multiple circular component-seating tracks (104) each including multiple component-seating sites (500) configured to retain an electrical component (510) such that its face (522) faces away from the test plate (102); a component receiving system (114, 106, 300, 302, 306, 308, 310, 400, 402, 502, and/or 508) positioned along a rotation path of the seating tracks (104); a component test module assembly (1502) for electrically contacting each electrical component (510) seated in a component-seating site (500); one or more collection bins (124); and a collection assembly (120) for collecting some of the electrical components (510) from component-seating sites (500) and directing the electrical components (510) into the bins (124) based on one or more tests conducted at the component test module assembly (1502).Type: GrantFiled: January 6, 2014Date of Patent: May 2, 2017Assignee: Electro Scientific Industries, Inc.Inventor: Douglas J. Garcia
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Patent number: 9610653Abstract: The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.Type: GrantFiled: September 20, 2013Date of Patent: April 4, 2017Assignee: Electro Scientific Industries, Inc.Inventors: Haibin Zhang, Fang Shan, Mathew Rekow, Min Zhang, Glenn Simenson, Qian Xu, James Brookhyser, Joe Frankel, Michael Darwin, Jack Rundel, Matthew Pysher
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Patent number: 9594937Abstract: Each data point within a two-dimensional code can be represented by a distribution of spots. Each spot can be made small enough to be invisible to the human eye so that the two-dimensional code can be invisible on or within transparent or nontransparent materials. The spots can be spaced at a large distance to increase the signal-to-noise ratio for an optical code reader. A code reader can be adapted to read the spots and determine the data points.Type: GrantFiled: February 24, 2015Date of Patent: March 14, 2017Assignee: Electro Scientific Industries, Inc.Inventors: Brian C. Johansen, Kyung Young Kim, Bruce W. Ball, Justin D. Redd
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Patent number: 9568167Abstract: A panel with an optically transmissive portion includes a group of holes drilled from one surface to another surface and filled with an optically transmissive material. The group of holes forms a pattern. The holes on a first surface form a smooth and continuous appearance to the naked eye. The holes on the other, second surface are sized so that a light source directed to the second surface illuminates the pattern to be visible to a viewer viewing the first surface. The panel may form a portion of a housing that houses the light source.Type: GrantFiled: March 12, 2013Date of Patent: February 14, 2017Assignee: Electro Scientific Industries, Inc.Inventors: Michael S. Nashner, Jeffrey Howerton, Weixiong Lu
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Patent number: 9527159Abstract: A laser machining system (20) employs a fast positioner (68), such as a pair of galvanometer mirrors (70), that directs a beam axis (24) at a specified velocity to a start position of a cutting path (92) in coincidence with one of multiple laser pulses emitted from a laser (28) a constant laser pulse repetition rate, which runs independently of the relative position of the beam axis (24) with respect to the workpiece (26).Type: GrantFiled: March 15, 2014Date of Patent: December 27, 2016Assignee: Electro Scientific Industries, Inc.Inventors: Joseph Frankel, Bob Beauchaine, Doug Gibson
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Patent number: 9524856Abstract: A sample chamber is configured to accommodate a target such that a portion of the target is removable as a sample. A carrier gas injection system is configured to introduce a carrier gas into the sample region from a first position and a second position within the sample chamber such that at least a portion of the sample is entrainable by the carrier gas within the sample region. A portion of the sample region is located between the first position and the second position. A sample transport conduit is configured to transport at least a portion of the sample entrained by the carrier gas to a location outside the sample chamber.Type: GrantFiled: February 6, 2014Date of Patent: December 20, 2016Assignee: Electro Scientific Industries, Inc.Inventors: Shane Hilliard, Ciaran J O'Connor, Jay Wilkins, Erik Larsen, Leif Summerfield
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Patent number: 9492887Abstract: A touch screen user interface for an optical device wherein the touch screen user interface is connected to a controller which controls motion stages permitting the motion stages to re-position, re-size, re-orient or focus the field of view of the optical device in response to commands input from the touch screen user interface.Type: GrantFiled: April 1, 2010Date of Patent: November 15, 2016Assignee: Electro Scientific Industries, Inc.Inventors: Leif Summerfield, Bill Clem, Jay Wilkins, Tom Wernikowski, Jay Bernasek
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Patent number: 9486877Abstract: Systems and methods provide laser pulse energy control and/or monitoring. An example laser processing apparatus includes a laser system to generate a beam of laser pulses and a pulse energy control system to adjust the pulse energy of each laser pulse in the beam on a pulse-by-pulse basis. The pulse energy control system includes an open loop feedforward control path that selects a pulse energy transmission value for each laser pulse based on a calibrated transmission curve that maps laser pulse energy as a function of pulse repetition frequency. A laser energy monitor measures the laser pulse energy of each laser pulse in the beam of laser pulses. A power control loop may further adjust the pulse energy of one or more laser pulses in the beam of laser pulses based on feedback from the laser energy monitor.Type: GrantFiled: January 9, 2014Date of Patent: November 8, 2016Assignee: Electro Scientific Industries, Inc.Inventor: Mark A. Unrath
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Patent number: 9463528Abstract: Laser output (114) is employed to mark an article (100) including a layer (104) supported by a substrate (102), wherein the layer (104) has a thickness (t) that is less than or equal to 50 microns. The laser output (114) is focused to a numerical aperture diffraction-limited spot size (32) of less than or equal to 5 microns at a focal point (80) of the beam waist (90) and directed into the layer (104) to form a plurality of structures comprising a plurality of laser-induced cracks within the layer (104) and within a region of the article (100), wherein the laser-induced cracks terminate within the layer (104) without extending to the substrate (102) or an outer surface (108) of the layer (104), and wherein the plurality of structures are configured to scatter light incident upon the article (100).Type: GrantFiled: August 15, 2014Date of Patent: October 11, 2016Assignee: Electro Scientific Industries, Inc.Inventors: Robert Reichenbach, Chuan Yang, Fang Shan
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Patent number: 9383732Abstract: A method and system for adaptively controlling a laser-based material processing process are provided. The system includes sensing equipment to measure a process variable or condition of at least one of a laser-based material processing system and a workpiece processed by the material processing system and to provide a corresponding measurement signal. The control system also includes a signal processor for processing the measurement signal to obtain a processed signal which initiates, at least semi-automatically, an action associated with at least one of the material processing system and the workpiece. A method and system for at least semi-automatically qualifying a laser-based material processing system which delivers laser energy to locations on or adjacent a plurality of microstructures formed on a workpiece to at least partially process the microstructures are also provided.Type: GrantFiled: December 2, 2013Date of Patent: July 5, 2016Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INC.Inventors: Joseph J. Griffiths, Kurt Pelsue
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Patent number: 9375946Abstract: Disclosed is a method for creating a mark desired properties on an anodized specimen and the mark itself. The method includes providing a laser marking system having a controllable laser pulse parameters, determining the laser pulse parameters associated with the desired properties and directing the laser marking system to mark the article using the selected laser pulse parameters. Laser marks so made have optical density that ranges from transparent to opaque, white color, texture indistinguishable from the surrounding article and durable, substantially intact anodization. The anodization may also be dyed and optionally bleached to create other colors.Type: GrantFiled: May 23, 2013Date of Patent: June 28, 2016Assignee: Electro Scientific Industries, Inc.Inventor: Haibin Zhang
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Patent number: 9352417Abstract: A substrate is diced using a program-controlled pulsed laser beam apparatus having an associated memory for storing a laser cutting strategy file. The file contains selected combinations of pulse rate ?t, pulse energy density E and pulse spatial overlap to machine a single layer or different types of material in different layers of the substrate while restricting damage to the layers and maximizing machining rate to produce die having predetermined die strength and yield. The file also contains data relating to the number of scans necessary using a selected combination to cut through a corresponding layer. The substrate is diced using the selected combinations. Gas handling equipment for inert or active gas may be provided for preventing or inducing chemical reactions at the substrate prior to, during or after dicing.Type: GrantFiled: September 17, 2013Date of Patent: May 31, 2016Assignee: Electro Scientific Industries, Inc.Inventors: Adrian Boyle, Oonagh Meighan
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Patent number: 9346130Abstract: A laser machining process is described for laser machining glass or glass-like materials. This process machines articles or features in articles with chamfered edges in one manufacturing operation. Chamfered edges are desirable in glass and glass-like materials because they resist fracturing or chipping and eliminate sharp edges. Producing articles or features in articles in one manufacturing operation is desirable because it can save time and expense by eliminating the need to transfer the article to a separate machine for chamfering after laser machining. Alternatively, it can permit use of less expensive equipment because the same laser used for machining can be used to form the chamfer instead of having a separate process perform the chamfering. Producing chamfers with laser machining results in high quality chamfers without the need for a separate polishing or finishing step.Type: GrantFiled: December 17, 2008Date of Patent: May 24, 2016Assignee: Electro Scientific Industries, Inc.Inventors: Weisheng Lei, Glenn Simenson, Hisashi Matsumoto, Guangyu Li, Jeffery Howerton
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Patent number: 9302350Abstract: A laser machining process is described for laser machining glass or glass-like materials. This process machines articles or features in articles with chamfered edges in one manufacturing operation. Chamfered edges are desirable in glass and glass-like materials because they resist fracturing or chipping and eliminate sharp edges. Producing articles or features in articles in one manufacturing operation is desirable because it can save time and expense by eliminating the need to transfer the article to a separate machine for chamfering after laser machining. Alternatively, it can permit use of less expensive equipment because the same laser used for machining can be used to form the chamfer instead of having a separate process perform the chamfering. Producing chamfers with laser machining results in high quality chamfers without the need for a separate polishing or finishing step.Type: GrantFiled: December 17, 2008Date of Patent: April 5, 2016Assignee: Electro Scientific Industries, Inc.Inventors: Weisheng Lei, Glenn Simenson, Hisashi Matsumoto, Guangyu Li, Jeffery Howerton
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Patent number: 9304090Abstract: A system is disclosed for repairing liquid crystal display panels that include a polarizing film. The system includes a laser repair optical system, a measurement optical system, and a processor. The laser repair optical system includes a polarization unit for modifying a polarization of a laser repair beam along a laser output path that is directed toward a workpiece. The measurement optical system includes an illumination source for providing measurement illumination along a measurement illumination path, and a detector for detecting reflected measurement illumination. The processor adjusts the polarization unit responsive to the reflected measurement illumination.Type: GrantFiled: March 11, 2013Date of Patent: April 5, 2016Assignee: Electro Scientific Industries, Inc.Inventor: James J. Cordingley
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Patent number: 9289858Abstract: A laser machining system is used to precision laser drill holes in an elastomeric material, preferably silicone rubber, to form holes to support miniature electronic components temporarily while they are being processed or tested. The holes are formed by directing laser pulses from a laser to a top surface of the elastomeric material in a plurality of passes in a direction proceeding from a non-zero inner diameter to the desired diameter or from the desired diameter to the inner diameter. The plurality of passes forms a first pattern such that a successive pass of the plurality of passes overlaps a previous pass of the plurality of passes. The first pattern is repeated without changing direction or the first pattern is repeated while reversing the direction until the hole is formed through a bottom surface of the elastomeric material.Type: GrantFiled: December 20, 2011Date of Patent: March 22, 2016Assignee: Electro Scientific Industries, Inc.Inventors: Michael Shane Noel, Todd C. SeCoy
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Patent number: 9269035Abstract: Each black square within a two-dimensional code can be represented by a distribution of spots. Each spot can be made small enough to be invisible to the human eye so that the two-dimensional code can be invisible on or within transparent or nontransparent materials. The spots can be spaced at a large distance to increase the signal-to-noise ratio for an optical code reader. A laser can be used to produce the spots.Type: GrantFiled: February 28, 2014Date of Patent: February 23, 2016Assignee: Electro Scientific Industries, Inc.Inventor: Justin D. Redd
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Patent number: 9266192Abstract: An apparatus for processing a workpiece can be exemplarily characterized as including a processing tool having a processing region within which a workpiece can be processed, and an illumination system configured to direct detection light into the processing region. In this embodiment, detection light directable by the illumination system has a wavelength to which the workpiece is at least partially opaque. The apparatus may further include an image sensor configured to detect a characteristic of the detection light transmitted through the processing region and a chuck configured to support a workpiece such that at least a portion of the workpiece is disposable within the processing region and is illuminatable by the detection light. Methods for processing a workpiece are also disclosed.Type: GrantFiled: May 29, 2012Date of Patent: February 23, 2016Assignee: Electro Scientific Industries, Inc.Inventor: Joseph G. Frankel