Patents Assigned to EM MICROLECTRONIC-MARIN SA
  • Publication number: 20140262052
    Abstract: The invention concerns a detaping process for a protective foil taped onto a front-side of a semiconductor wafer, this detaping process comprising the successive steps of: A) introducing the wafer and the protective foil taped onto the front-side of the semiconductor wafer into an electrically dissipative liquid or into an electrically dissipative solid-state medium having a flowing behavior substantially similar to the one of a liquid; B) removing the protective foil when the wafer is into the electrically dissipative liquid or into the electrically dissipative solid-state medium. In another implementing mode, the detaping process comprises, during the removing of the protective foil, a spray of an electrically dissipative liquid in the region adjacent to the detaping line between the semiconductor wafer and the protective foil or an injection of an electrically dissipative liquid along this detaping line.
    Type: Application
    Filed: March 12, 2013
    Publication date: September 18, 2014
    Applicant: EM MICROLECTRONIC-MARIN SA
    Inventor: Peter Jacob