Abstract: A fixed abrasive three-dimensional plate includes micron size diamond beads or a mixture of abrasive particles and metal oxide beads, ranging in size from a few microns to a few tens of microns, incorporated into a matrix of one or more inorganic binders and fillers. The composition is formed into a rigid plate blank, and the abrasive plate is mounted on a substrate forming a lapping/polishing plate. The abrasive plate is capable of delivering high material removal rates coupled with reduced surface roughness when lapping/polishing advanced materials, including sapphire, titanium carbide reinforced alumina, silicon carbide, gallium nitride, aluminum nitride, zinc selenide, and other compound semiconductor materials, as well as, glass, ceramic, metallic, and composite workpieces. The diamond beads incorporated in the fixed abrasive three-dimensional plate include diamond particles ranging in size from a few nanometers to a few tens of microns, bonded with one or more inorganic binders and additives.

Abstract: A method is provided of etching a diamond particle including the step of heating the particle at a temperature of about 700° C. or greater in the presence of water vapor to form an etched particle. Also provided is an etched particle having a core and a surface. The core is formed of sp3 hybridized carbon atoms covalently bonded together, and the surface has substantially no chlorine atoms, oxygen atoms or oxygen species.

Abstract: A method and apparatus are provided for measuring the crushing strength of an abrasive, comprising particles, used in a lapping process. Embodiments include a crushing strength tester having a cup for holding the abrasive; a first motor for rotating the cup in a first direction; a piston having a face for rotatably fitting within the cup and contacting the abrasive; a second motor for rotating the piston in a second direction opposite the first direction; and a press for pressing the piston against the abrasive and crushing the particles while the first and second motors are rotating. An initial particle size distribution for the particles is determined, then the abrasive is subjected to a crushing force approximately equal to that of the lapping process using the crushing strength tester. A post-crushing particle size distribution for the particles is determined, and the initial and post-crushing particle size distributions are compared.

Abstract: A system and method are disclosed for preparing platens to perform lapping operations. The system includes a platter that is rotatably mounted on a base and designed to receive the platen thereon. A main drive motor is provided for rotating the platter and the platen disposed thereon. A plurality of pressure arms are disposed on the base and configured to include a tool receiving portion that can be positioned in alignment with a lapping surface of the platen, and configured to softly touch a tool to a platen. A tool is attached to each tool receiving portion so that predetermined operations can be performed on the lapping surface of the platen. A monitor is provided to monitor predetermined parameters and maintain substantially constant conditions while preparing the platen.

Abstract: A system and method are disclosed for preparing platens to perform lapping operations. The system includes a platter that is rotatably mounted on a base and designed to receive the platen thereon. A main drive motor is provided for rotating the platter and the platen disposed thereon. A plurality of pressure arms are disposed on the base and configured to include a tool receiving portion that can be positioned in alignment with a lapping surface of the platen. A tool is attached to each tool receiving portion so that predetermined operations can be performed on the lapping surface of the platen. A monitor is provided to monitor predetermined parameters and maintain substantially constant conditions while preparing the platen.

Abstract: An outside diameter finishing tool (10) has an outer shell (16) and an inner annular abrasive layer (22) for precision finishing the outer surfaces of generally cylindrical workpieces. The inner layer (22) of the tool (10) is made of superabrasives and defines the cutting size of the tool (10). The inner layer (22) cuts simultaneously around the full periphery of a cylindrical workpiece rotated within the tool (10). A slot (14) is provided through the tool (10) to allow for radial adjustment of the cutting size of the tool (10).

Abstract: An outside diameter finishing tool (10) has an outer shell (16) and an inner annular abrasive layer (22) for precision finishing the outer surfaces of generally cylindrical workpieces. The inner layer (22) of the tool (10) is made of superabrasives and defines the cutting size of the tool (10). The inner layer (22) cuts simultaneously around the full periphery of a cylindrical workpiece rotated within the tool (10). A slot (14) is provided through the tool (10) to allow for radial adjustment of the cutting size of the tool (10).

Abstract: An outside diameter finishing tool (10) has an outer shell (16) and an inner annular abrasive layer (22) for precision finishing the outer surfaces of generally cylindrical workpieces. The inner layer (22) of the tool (10) is made of superabrasives and defines the cutting size of the tool (10). The inner layer (22) cuts simultaneously around the full periphery of a cylindrical workpiece rotated within the tool (10). A slot (14) is provided through the tool (10) to allow for radial adjustment of the cutting size of the tool (10).