Patents Assigned to Entergris, Inc.
  • Patent number: 6575187
    Abstract: A 3-way valve for controlling the flow between first and second ports and a common port. The 3-way valve comprising a valve body having an integral flow portion and a valve stem having first and second valve members. The valve stem is pressfit assembled into the flow portion of the valve body where at least one of the first valve member and the flow portion momentarily deforms. The valve stem operates between a first position where fluid is allowed to flow between the common port and the second port and a second position where fluid is allowed to flow between the common port and the first port.
    Type: Grant
    Filed: September 12, 2001
    Date of Patent: June 10, 2003
    Assignee: Entergris, Inc.
    Inventors: John A. Leys, Michael Stoick
  • Patent number: 6550619
    Abstract: A wafer shipper for stacked wafers provides significantly improved resistance to shock and impact as well as flexibility and tolerance in wafer capacities and guidance in optimal amount of packing material. The shipper has a base and a top cover both of which have a nominal wall that primarily forms all of the features of the respective components. The base has four sides, four corners, and arcuate wall segments defining a wafer stack pocket. The sides are formed of a downwardly extending nominal wall portion and an upwardly extending lip. Both adjoin a nominal wall defining a planar surface that extends around the base and forms a seat for the top cover. The planar surface adjoins the arcuate wall segments and also adjoins the floor of the wafer stack pocket that is also part of the nominal wall.
    Type: Grant
    Filed: May 8, 2001
    Date of Patent: April 22, 2003
    Assignee: Entergris, Inc.
    Inventors: Gregory W. Bores, Michael C. Zabka, Ralph Henderer