Abstract: An angular velocity detection apparatus (i.e., physical quantity detection apparatus) includes a gyro sensor element (i.e., physical quantity detection element) that allows an angular velocity detection signal that corresponds to the magnitude of an angular velocity (i.e., physical quantity) and a leakage signal of vibrations based on a drive signal (square-wave voltage signal) to flow through a detection electrode, a driver circuit that generates the drive signal, a synchronous detection circuit that performs a synchronous detection process on a detection target signal that includes the angular velocity detection signal and the leakage signal based on a detection signal that is synchronized with the drive signal, and a phase change circuit that changes a relative timing of at least one of a rising edge and a falling edge of the detection signal with respect to the detection target signal based on a control signal so that at least part of the leakage signal is output by the synchronous detection process.

Abstract: A flexural vibration piece including a vibrator having a first region on which a compressive stress or a tensile stress acts and a second region on which a tensile stress acts when a compressive stress acts on the first region and a compressive stress acts when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and a heat conduction path formed of a material having a thermal conductivity higher than the vibrator and that thermally connects the regions, wherein when m is the number of heat conduction paths, ?th is the thermal resistivity of the heat conduction path, ?v is the thermal resistivity of the vibrator, tv is the thickness of the vibrator in a direction orthogonal to the first plane, and tth is the thickness of the heat conduction path, a relationship of tth?(1/m)×tv×(?th/?v) is satisfied.

Abstract: A piezoelectric device includes: a base substrate; an electronic component provided on a first surface of the base substrate; and a piezoelectric resonator that is provided on the first surface of the base substrate without planarly overlapping with the electronic component and have a package base, a mounting surface of the package base having one of a recessed part and a cutout part. In the device, the base substrate includes a resonator-disposing section disposed in a region of the one of the recessed part and the cutout part of the piezoelectric resonator and the resonator-disposing section is a part of the base substrate in plan view and is coupled to a bottom surface of the one of the recessed part and the cutout part.

Abstract: A quartz crystal resonator element includes an AT-cut quartz crystal substrate, the substrate having edges parallel to each of a Z? axis obtained by rotating a Z? axis in a range of ?120° to +60° about a Y? axis and an X? axis perpendicular to the Z? axis when an angle formed by rotating a +Z? axis in a direction of a +X axis about the Y? axis is a positive rotation angle; a thin section that forms a resonating section; and a thick section adjacent to the resonating section, the thin section and the thick section being formed on the quartz crystal substrate by wet etching. The thin section is formed either on a main surface of the substrate corresponding to a +Y?-axis side or on a main surface of the substrate corresponding to a ?Y?-axis side.

Abstract: A flexural resonator element includes a base body and a beam with a groove and a through-hole, the beam being extended in a Y direction from the base body and flexurally vibrating in an X direction orthogonal to the Y direction, the groove being formed on a surfaces of the beam perpendicular to a Z direction orthogonal to the X direction and the Y direction, and the through-hole having a smaller width in the X direction than a width of an opening of the groove in the X direction and penetrating from an inner surface of the groove formed on the surface of the beam to a surface of the beam opposite to the surface of the beam having the groove.

Abstract: A surface acoustic wave device, includes: an interdigital transducer serving as an electrode pattern to excite a Rayleigh surface acoustic wave, the interdigital transducer including a comb-tooth-shaped electrode having a plurality of electrode fingers; a piezoelectric substrate on which the interdigital transducer is formed, the piezoelectric substrate being made of a quartz substrate that is cut out at a cut angle represented by an Euler angle representation (?, ?, ?) of (0°, 95°???155°, 33°?|?|?46°); electrode finger grooves formed between the electrode fingers of the comb-tooth-shaped electrode; and electrode finger bases being quartz portions sandwiched between the electrode finger grooves and having upper surfaces on which the electrode fingers are positioned. The surface acoustic wave device provides an excitation in an upper limit mode of a stop band of the surface acoustic wave.

Abstract: A physical section of an atomic oscillator includes: a gas cell in which gaseous metal atoms are sealed, and the gas cell includes a first window having optical transparency; a light source that emits excitation light toward the metal atoms through the first window; a first heating unit that disposes at the first window and that is located between the first window and the light source; and a Peltier element that is stacked on the first heating unit, that is located between the first heating unit and the light source, and that decreases a temperature of a side of the Peltier element facing the light source than a temperature of an opposite side of the Peltier element facing the gas cell.

Abstract: [Problems to be Solved] To obtain a laminated quarter-wave plate having a bandwidth of a plurality of wavelengths to be a phase difference of 90 degrees broadened [Means to Solve the Problem] A laminated wave plate of the present invention includes a first wave plate having a phase difference of ?1 and a second wave plate having a phase difference of ?2 with respect to a wavelength ?, the first wave plate and the second wave plate being bonded together so that an optical axis of the first wave plate and an optical axis of the second wave plate are intersected each other to function as a quarter-wave plate as a whole, the laminated wave plate comprising following equations from (1) to (6): ?1=360×(n1+1) . . . (1); ?2=90×(2×n2+1) . . . (2); ??1=(?12a??11a)/(?12??11) . . . (3); ??2=(?12b??11b)/(?12??11) . . . (4); cos 2?1=1?(1?cos ??F)/2(1?cos ??1) . . . (5); and ?2=45°±5° . . .

Abstract: First and a second wave plates using quartz crystal having birefringence are laminated together in such a manner that their optical axes intersect to form a laminated wave plate functioning as a half-wave plate as a whole. Phase differences of the first and the second wave plates relative to an ordinary ray and an extraordinary ray with respect to a predetermined wavelength ? are set to be ?1 and ?2, an order of a high-mode order is set to be a natural number n, whereby the high-order mode laminated half-wave plate is formed so as to satisfy: ?1=180°+360°×n; and ?2=180°+360°×n.

Abstract: A quartz crystal resonator element includes an AT-cut quartz crystal substrate, the substrate having edges parallel to each of a Z? axis obtained by rotating a Z? axis in a range of ?120° to +60° about a Y? axis and an X? axis perpendicular to the Z? axis when an angle formed by rotating a +Z? axis in a direction of a +X axis about the Y? axis is a positive rotation angle; a thin section that forms a resonating section; and a thick section adjacent to the resonating section, the thin section and the thick section being formed on the quartz crystal substrate by wet etching. The thin section is formed either on a main surface of the substrate corresponding to a +Y?-axis side or on a main surface of the substrate corresponding to a ?Y?-axis side.

Abstract: A pressure sensor includes: a housing; an attachment portion coupled to the housing and having a pressure input orifice; a diaphragm sealing the pressure input orifice of the attachment portion and having a first surface that is a pressure receiving surface; and a pressure sensitive unit having a detecting axis in a direction in which a force is detected. In the sensor, an end of the pressure sensitive unit is connected to a central area of a second surface of the diaphragm, another end of the pressure sensitive unit is connected to the housing, and the detecting axis is approximately orthogonal to the pressure receiving surface.

Abstract: A flexural resonator element includes a base body and a beam with a groove and a through-hole, the beam being extended in a Y direction from the base body and flexurally vibrating in an X direction orthogonal to the Y direction, the groove being formed on a surfaces of the beam perpendicular to a Z direction orthogonal to the X direction and the Y direction, and the through-hole having a smaller width in the X direction than a width of an opening of the groove in the X direction and penetrating from an inner surface of the groove formed on the surface of the beam to a surface of the beam opposite to the surface of the beam having the groove.

Abstract: An SH wave type surface acoustic wave device includes a piezoelectric substrate and an IDT electrode provided on the piezoelectric substrate and constituted of Al or an alloy mainly containing Al and that uses a SH wave as an excitation wave. The piezoelectric substrate is a crystal plate in which a cut angle ? of a rotary Y cut quartz substrate is set in a range of ?64.0°<?<?49.3° in a counter-clockwise direction from a crystal axis Z and in which a surface acoustic wave propagation direction is set at 90°±5° with respect to a crystal axis X. An electrode film thickness H/? standardized by a wavelength of the IDT electrode is 0.04<H/?<0.12, where ? is a wavelength of the surface acoustic wave to be excited, and a main surface of the piezoelectric substrate is etched by a thickness of 0.002 ?m or more.

Abstract: A pressure sensor includes: a housing having openings at both ends thereof; a pair of pressure-receiving devices configured to seal the openings respectively and transmit a pressure from the outside to the interior of the housing; a force transmission device configured to connect the pair of pressure-receiving devices and transmit a force that one of the pressure-receiving devices receives to the other pressure-receiving device; and a pressure-sensitive element having a pressure-sensitive portion and a pair of base portions to be connected to both ends of the pressure-sensitive portion, wherein a line connecting the pair of base portions and a detection axis, which is a direction of detection of the force, and the direction of displacement of the force transmission device are arranged in parallel; the one of the base portions is a first fixed portion, a pair of connecting devices extending from the other base portion so as to interpose the pressure-sensitive portion are connected respectively to a pair of sec

Abstract: A method for manufacturing an acceleration sensing unit includes: providing an element support substrate in which a plurality of element supporting members is arranged so as to form a plane, each of the element supporting members being coupled to the other element supporting member through a supporting part and having a fixed part and a movable part that is supported by the fixed part through a beam, the beam having a flexibility with which the movable part is displaced along an acceleration detection axis direction when an acceleration is applied to the movable part; providing an stress sensing element substrate in which a plurality of stress sensing elements is arranged so as to form a plane, each of the stress sensing elements being coupled to the other stress sensing element through an element supporting part and having a stress sensing part and fixed ends that are formed so as to have a single body with the stress sensing part at both ends of the stress sensing part; disposing the stress sensing element

Abstract: It is possible to reduce the size of a surface acoustic wave resonator by enhancing the Q value. In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, a line occupying ratio is defined as a value obtained by dividing the width of one electrode finger by the distance between the center lines of the gaps between one electrode finger and the electrode fingers adjacent to both sides thereof, and the IDT includes a region formed by gradually changing the line occupying ratio from the center to both edges so that the frequency gradually becomes lower from the center to both edges than the frequency at the center of the IDT.

Abstract: Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.

Abstract: In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, the line occupying ratio causing the maximum electromechanical coupling coefficient and the line occupying ratio causing the maximum reflection of the surface acoustic waves in the IDT are different from each other, the center of the IDT has the line occupying ratio causing an increase in electromechanical coupling coefficient in comparison with the edges of the IDT, and the edges of the IDT have the line occupying ratio causing an increase in reflection of the surface acoustic waves in comparison with the center of the IDT.

Abstract: It is possible to reduce the size of a surface acoustic wave (SAW) resonator by enhancing a Q value. In a SAW resonator in which an IDT having electrode fingers for exciting SAW is disposed on a crystal substrate, the IDT includes a first region disposed at the center of the IDT and a second region and a third region disposed on both sides of the first region. A frequency is fixed in the first region and a portion in which a frequency gradually decreases as it approaches an edge of the IDT is disposed in the second region and the third region. When the frequency of the first region is Fa, the frequency at an edge of the second region is FbM, and the frequency at an edge of the third region is FcN, the variations in frequency are in the ranges of 0.9815<FbM/Fa<0.9953 and 0.9815<FcN/Fa<0.9953, respectively.

Abstract: A turntable (230) is installed so that an upper side (231) of the turntable is horizontal (S10). A posture detection device (1) is secured on a side (211) of a cubic jig (210) so that an X-axis (first axis) perpendicularly intersects a side (212) (second side), a Y-axis (second axis) perpendicularly intersects a side (213) (third side), and a Z-axis (third axis) perpendicularly intersects the side (211) (first side) (S12). The side of the cubic jig opposite to the side (212), (213), or (211) is sequentially secured on the upper side of the turntable (S14, S20, and S26). Detection values of the posture detection device are acquired in a state in which the turntable is stationary or rotated at a predetermined angular velocity (S16, S18, S22, S24, S28, and S30), and correction parameters are created (S32).