Patents Assigned to EUGENETECH MATERIALS CO., LTD.
  • Publication number: 20210130954
    Abstract: Disclosed is a method of forming a thin film using a surface protection material, the method comprising supplying the surface protection material to the inside of a chamber on which a substrate is placed so that the surface protection material is adsorbed to the substrate, discharging the unadsorbed surface protection material from the inside of the chamber by purging the interior of the chamber, supplying a metal precursor to the inside of the chamber so that the metal precursor is adsorbed to the substrate, discharging the unadsorbed metal precursor from the inside of the chamber by purging the interior of the chamber, and supplying a reaction material to the inside of the chamber so that the reaction material reacts with the adsorbed metal precursor to form the thin film.
    Type: Application
    Filed: July 24, 2020
    Publication date: May 6, 2021
    Applicant: EUGENETECH MATERIALS CO., LTD.
    Inventors: Geun Su LEE, Jae Min KIM, Ha Na KIM, Woong Jin CHOI, Eun Ae JUNG, Dong Hyun LEE, Myung Soo LEE, Ji Won MOON, Dong Hak JANG, Hyun Sik NOH
  • Patent number: 10597777
    Abstract: The invention relates to a precursor composition containing a mixture of a Group IV organic compound represented by Formula 19 and any one compound selected from an organic aluminum compound represented by Formula 1, an organic gallium compound represented by Formula 7, or an organic germanium compound represented by Formula 16, and a method for forming a thin film by using the precursor composition.
    Type: Grant
    Filed: November 1, 2016
    Date of Patent: March 24, 2020
    Assignee: EUGENETECH MATERIALS CO., LTD.
    Inventors: Geun-Su Lee, Yeong-Min Lee
  • Publication number: 20180347042
    Abstract: A precursor composition according to an embodiment of the present invention contains a mixture of a Group IV organic compound and any one compound selected from an organic aluminum compound, an organic gallium compound, or an organic germanium compound.
    Type: Application
    Filed: November 1, 2016
    Publication date: December 6, 2018
    Applicant: EUGENETECH MATERIALS CO., LTD.
    Inventors: Geun-Su LEE, Yeong-Min LEE