Patents Assigned to Evigia Systems, Inc.
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Patent number: 11519772Abstract: Pressure sensor systems for measuring a liquid pressure and deriving a liquid level from the measured pressure using gas pressure sensing devices. In one embodiment, liquid pressure results in compression or decompression of a trapped gas (as an example, air), wherein the gas pressure is detected by a gas pressure sensing device directly or a gas pressure sensing device that is protected inside a flexible pouch filled with a liquid. In another embodiment, a gas pressure sensing device is packaged in a flexible pouch filled with an inert liquid to protect the sensing device and circuit thereof from external contaminants while accurately transferring pressure from the liquid through a protective barrier. Application of such sensors in a wireless flood or a wireless liquid level measurement system is described as well.Type: GrantFiled: June 10, 2019Date of Patent: December 6, 2022Assignee: Evigia Systems, Inc.Inventors: Mark Krammer, Siva Aduri, Navid Yazdi
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Patent number: 11498826Abstract: Automatic identification and pairing authentication systems, devices, and methods capable of identifying and verifying the pairing of kegs and taps regardless of the position of a tap relative to a keg on which it is installed. Such a system includes an identification (ID) unit integrated onto a keg and a pairing device integrated onto a tap, wherein the ID unit and the pairing device communicate through a wireless connection.Type: GrantFiled: September 23, 2020Date of Patent: November 15, 2022Assignee: Evigia Systems, Inc.Inventors: Navid Yazdi, Michael Young, Siva Aduri, Mark Krammer
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Publication number: 20170275157Abstract: The present invention generally relates to an ovenized platform and a fabrication process thereof. Specifically, the invention relates to an ovenized hybrid Si/SiO2 platform compatible with typical CMOS and MEMS fabrication processes and methods of its manufacture. Embodiments of the invention may include support arms, CMOS circuitry, temperature sensors, IMUs, and/or heaters among other elements.Type: ApplicationFiled: March 27, 2017Publication date: September 28, 2017Applicant: Evigia Systems, Inc.Inventors: Weibin Zhu, Navid Yazdi
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Patent number: 8847337Abstract: Processes and fixtures for producing electromechanical devices, and particularly three-dimensional electromechanical devices such as inertial measurement units (IMUs), through the use of a fabrication process and a three-dimensional assembly process that entail joining single-axis device-IC chips while positioned within a mounting fixture that maintains the orientations and relative positions of the chips during the joining operation.Type: GrantFiled: February 24, 2012Date of Patent: September 30, 2014Assignee: Evigia Systems, Inc.Inventors: Navid Yazdi, Yafan Zhang, Weibin Zhu
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Patent number: 8677802Abstract: A sensing module and method for monitoring various physical parameters, and particularly environmental parameters to which a living body may be subjected, for example, impacts and shock wave pulses. The module at least one energy storage device and at least one set of electromechanical sensing elements contained in a housing. The sensing elements are responsive to an external environmental input, and each sensing element defines an open electrical path when not subjected to the input, is operable to define a closed electrical path that produces an output in response to the input if the input exceeds a threshold of the sensing element. The module generates data corresponding to the outputs of the sensing elements and records the data.Type: GrantFiled: August 24, 2010Date of Patent: March 25, 2014Assignee: Evigia Systems, Inc.Inventors: Robert William Hower, Yafan Zhang, Navid Yazdi
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Patent number: 8487508Abstract: A sensing system, sensing method, and method of producing a sensing system capable of providing a cumulative measurement capability, such as in the form of a RFID tag capable of measuring cumulative heat and humidity for continuous monitoring of storage and shipping conditions of various goods. The system includes integrated circuitry and a plurality of sensing elements, preferably having cantilevered bimorph beams. Each sensing element is responsive to an environmental condition so as to deflect toward and away from open contacts in response to changes in the environmental condition. Each sensing element produces a digital output when it contacts and closes its open contacts. The integrated circuitry interfaces with the sensing elements so that the digital outputs of the sensing elements are processed to generate a system output of the sensing system.Type: GrantFiled: October 8, 2009Date of Patent: July 16, 2013Assignee: Evigia Systems, Inc.Inventor: Navid Yazdi
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Patent number: 8119498Abstract: A wafer bonding process that compensates for curvatures in wafer surfaces, and a wafer stack produced by the bonding process. The process entails forming a groove in a surface of a first wafer, depositing a bonding stack on a surface of a second wafer, aligning and mating the first and second wafers so that the bonding stack on the second wafer contacts a bonding site on the first wafer, and then heating the first and second wafers to reflow the bonding stack. The groove either surrounds the bonding site or lies entirely within the bonding site, and the heating step forms a molten bonding material, causes at least a portion of the molten bonding material to flow into the groove, and forms a bonding structure that bonds the second wafer to the first wafer. Bonding stacks having different lateral surface areas can be deposited to form bonding structures of different heights to compensate for variations in the wafer gap.Type: GrantFiled: September 23, 2009Date of Patent: February 21, 2012Assignee: Evigia Systems, Inc.Inventors: Guangqing Mengi, Yafan Zhang, Navid Yazdi
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Patent number: 8056413Abstract: A sensor and sensing method capable of full-differential symmetry to minimize bias drift and improve stability of the sensor output. The sensor includes a sensing element, sense electrodes capacitively coupled to the sensing element to generate capacitive outputs that vary in response to the motion of the sensing element, and a differential readout device. The sense electrodes are electrically separable into at least two pairs of differential sense electrodes. The readout device performs a sampling sequence of at least two sampling cycles during which the readout device samples the capacitive outputs of the sense electrodes and produces at least two differential outputs based on the difference between the capacitive outputs within each pair of differential sense electrodes. The readout device then calculates an average of the differential outputs of the sampling sequence to produce an output of the differential readout device, and thereafter repeats the sampling sequence and calculation.Type: GrantFiled: September 11, 2008Date of Patent: November 15, 2011Assignee: Evigia Systems, Inc.Inventor: Navid Yazdi
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Publication number: 20110203347Abstract: A sensing module and method for monitoring various physical parameters, and particularly environmental parameters to which a living body may be subjected, for example, impacts and shock wave pulses. The module at least one energy storage device and at least one set of electromechanical sensing elements contained in a housing. The sensing elements are responsive to an external environmental input, and each sensing element defines an open electrical path when not subjected to the input, is operable to define a closed electrical path that produces an output in response to the input if the input exceeds a threshold of the sensing element. The module generates data corresponding to the outputs of the sensing elements and records the data.Type: ApplicationFiled: August 24, 2010Publication date: August 25, 2011Applicant: EVIGIA SYSTEMS INC.Inventors: Robert William Hower, Yafan Zhang, Navid Yazdi
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Patent number: 7907037Abstract: A MEMS module that contains at least one integrated energy storage device whose discharge is minimized and controlled, so that power is available for system operation over longer periods of time. The MEMS module includes a device electrically coupled to the energy storage device for controlling charge transfers from the energy storage device while preventing charge leakage from the energy storage device. The controlling device includes a plurality of integrated MEMS switches that define open electrical paths that prevent charge leakage from the energy storage device through the MEMS switches, and are then operable to define closed electrical paths to allow charge transfers from the energy storage device, and preferably also allow charge transfers to the energy storage device, through the MEMS switches. The charge transfer can be utilized to power electronic circuits or store data in non-volatile digital memory.Type: GrantFiled: February 5, 2007Date of Patent: March 15, 2011Assignee: Evigia Systems, Inc.Inventor: Navid Yazdi
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Publication number: 20110009773Abstract: Implantable sensing modules and methods for monitoring various physical parameters, including physical parameters of a living body and environmental parameters to which the living body may be subjected, for example, impacts. A method for monitoring impacts to which a living body is subjected entails the use of an implantable sensing module that has a rigid housing containing at least one energy storage device and at least one electromechanical sensing element that is responsive to impacts. The module generates data corresponding to impacts to which the electromechanical sensing element is subjected, and records the data in memory. The module is preferably implanted in a living body so that the module is connected to a rigid portion of the living body, in particular, a bone or tooth.Type: ApplicationFiled: August 13, 2010Publication date: January 13, 2011Applicant: EVIGIA SYSTEMS, INC.Inventors: Robert William Hower, Navid Yazdi, Yafan Zhang
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Patent number: 7827660Abstract: A bimorphic structure responsive to changes in an environmental condition, sensor structures incorporating one or more of such bimorphic structures, and a method of forming such bimorphic structures. The sensor structure has an electrically-conductive first contact on a substrate, and a bimorph beam anchored to the substrate so that a portion thereof is suspended above the first contact. The bimorph beam has a multilayer structure that includes first and second layers, with the second layer between the first layer and the substrate. A portion of the first layer projects through an opening in the second layer toward the first contact so as to define an electrically-conductive second contact located on the beam so as to be spaced apart and aligned with the first contact for contact with the first contact when the beam sufficiently deflects toward the substrate.Type: GrantFiled: July 30, 2008Date of Patent: November 9, 2010Assignee: Evigia Systems, Inc.Inventors: Bishnu Prasanna Gogoi, Navid Yazdi
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Patent number: 7810394Abstract: A micromachined sensor having a capacitive sensing structure. The sensor includes a first substrate with first and second conductive layers separated by a buried insulator layer, and a member defined by the first and second conductive layers and the buried insulator layer. A first set of elements defined with the first conductive layer is connected to the member and includes first and second elements that are electrically isolated from each other by the buried insulator layer. A second set of elements is defined with the first conductive layer and capacitively coupled with the first set of elements. A second substrate is bonded to the first substrate so that the member and the first set of elements are movably supported above the second substrate. The second set of elements is anchored to the second substrate, and the first and second sets of elements are physically interconnected through the second substrate.Type: GrantFiled: February 10, 2009Date of Patent: October 12, 2010Assignee: Evigia Systems Inc.Inventor: Navid Yazdi
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Patent number: 7732302Abstract: A micromachined sensor and a process for fabrication and vertical integration of a sensor and circuitry at wafer-level. The process entails processing a first wafer to incompletely define a sensing structure in a first surface thereof, processing a second wafer to define circuitry on a surface thereof, bonding the first and second wafers together, and then etching the first wafer to complete the sensing structure, including the release of a member relative to the second wafer. The first wafer is preferably a silicon-on-insulator (SOI) wafer, and the sensing structure preferably includes a member containing conductive and insulator layers of the SOI wafer. Sets of capacitively coupled elements are preferably formed from a first of the conductive layers to define a symmetric capacitive full-bridge structure.Type: GrantFiled: February 19, 2008Date of Patent: June 8, 2010Assignee: Evigia Systems, Inc.Inventor: Navid Yazdi
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Patent number: 7690255Abstract: A three-axis inertial sensor and a process for its fabrication using an silicon-on-oxide (SOI) wafer as a starting material. The SOI wafer has a first conductive layer separated from a second conductive layer by an insulative buried oxide (BOX) layer. The SOI wafer is fabricated to partially define in its first conductive layer at least portions of proof masses for z, x, and y-axis sensing devices of the sensor. After a conductive deposited layer is deposited and patterned to form a suspension spring for the proof mass of the z-axis sensing device, the SOI wafer is bonded to a substrate that preferably carries interface circuitry for the z, x, and y-axis devices, with the SOI wafer being oriented so that its first conductive layer faces the substrate. Portions of the BOX layer are then etched to fully release the proof masses.Type: GrantFiled: August 31, 2007Date of Patent: April 6, 2010Assignee: Evigia Systems, Inc.Inventors: Bishnu Prasanna Gogoi, Navid Yazdi
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Publication number: 20100072555Abstract: A wafer bonding process that compensates for curvatures in wafer surfaces, and a wafer stack produced by the bonding process. The process entails forming a groove in a surface of a first wafer, depositing a bonding stack on a surface of a second wafer, aligning and mating the first and second wafers so that the bonding stack on the second wafer contacts a bonding site on the first wafer, and then heating the first and second wafers to reflow the bonding stack. The groove either surrounds the bonding site or lies entirely within the bonding site, and the heating step forms a molten bonding material, causes at least a portion of the molten bonding material to flow into the groove, and forms a bonding structure that bonds the second wafer to the first wafer. Bonding stacks having different lateral surface areas can be deposited to form bonding structures of different heights to compensate for variations in the wafer gap.Type: ApplicationFiled: September 23, 2009Publication date: March 25, 2010Applicant: EVIGIA SYSTEMS, INC.Inventors: Guangqing Meng, Yafan Zhang, Navid Yazdi
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Publication number: 20100040113Abstract: A sensing system, sensing method, and method of producing a sensing system capable of providing a cumulative measurement capability, such as in the form of a RFID tag capable of measuring cumulative heat and humidity for continuous monitoring of storage and shipping conditions of various goods. The system includes integrated circuitry and a plurality of sensing elements, preferably having cantilevered bimorph beams. Each sensing element is responsive to an environmental condition so as to deflect toward and away from open contacts in response to changes in the environmental condition. Each sensing element produces a digital output when it contacts and closes its open contacts. The integrated circuitry interfaces with the sensing elements so that the digital outputs of the sensing elements are processed to generate a system output of the sensing system.Type: ApplicationFiled: October 8, 2009Publication date: February 18, 2010Applicant: EVIGIA SYSTEMS, INC.Inventor: Navid Yazdi
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Patent number: 7619346Abstract: A sensing system, sensing method, and method of producing a sensing system capable of providing a cumulative measurement capability, such as in the form of a RFID tag capable of measuring cumulative heat and humidity for continuous monitoring of storage and shipping conditions of various goods. The system includes integrated circuitry and a plurality of sensing elements, preferably having cantilevered bimorph beams. Each sensing element is responsive to an environmental condition so as to deflect toward and away from open contacts in response to changes in the environmental condition. Each sensing element produces a digital output when it contacts and closes its open contacts. The integrated circuitry interfaces with the sensing elements so that the digital outputs of the sensing elements are processed to generate a system output of the sensing system.Type: GrantFiled: May 13, 2006Date of Patent: November 17, 2009Assignee: Evigia Systems, Inc.Inventor: Navid Yazdi
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Patent number: 7562573Abstract: A micromachined sensor and a process for fabrication and vertical integration of a sensor and circuitry at wafer-level. The process entails processing a first wafer to incompletely define a sensing structure in a first surface thereof, processing a second wafer to define circuitry on a surface thereof, bonding the first and second wafers together, and then etching the first wafer to complete the sensing structure, including the release of a member relative to the second wafer. The first wafer is preferably a silicon-on-insulator (SOI) wafer, and the sensing structure preferably includes a member containing conductive and insulator layers of the SOI wafer. Sets of capacitively coupled elements are preferably formed from a first of the conductive layers to define a symmetric capacitive full-bridge structure.Type: GrantFiled: July 20, 2006Date of Patent: July 21, 2009Assignee: Evigia Systems, Inc.Inventor: Navid Yazdi
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Publication number: 20090140356Abstract: A micromachined sensor having a capacitive sensing structure. The sensor includes a first substrate with first and second conductive layers separated by a buried insulator layer, and a member defined by the first and second conductive layers and the buried insulator layer. A first set of elements defined with the first conductive layer is connected to the member and includes first and second elements that are electrically isolated from each other by the buried insulator layer. A second set of elements is defined with the first conductive layer and capacitively coupled with the first set of elements. A second substrate is bonded to the first substrate so that the member and the first set of elements are movably supported above the second substrate. The second set of elements is anchored to the second substrate, and the first and second sets of elements are physically interconnected through the second substrate.Type: ApplicationFiled: February 10, 2009Publication date: June 4, 2009Applicant: Evigia Systems, Inc.Inventor: Navid Yazdi